System Features

RF Power

75W peak, 50W continuous power output.

Dual Action Cleaning

Advanced cleaning using both plasma and UV afterglow.

Energy Efficient

Hollow cathode, capacitive coupled plasma (CCP) technology.

Pop Ignition

Patent-pending ignition technology at high vacuum.

Programmable & Smart Control

Set power, cleaning time, cycles and recipes via a custom remote or tethered touchpad.

Alternative Gases

Run a range of process gases to tailor the cleaning chemistry to your application.

Wide Pressure Range

Operation from 0.3 Pa (2 mTorr) to 80 Pa (600 mTorr).

External Interlock

Optional external interlock connection for safety.

TMP Compatible

No advance venting needed for operation.

Efficient Free-Radicals

Gas radicals immediately attack hydrocarbon bonds, producing harmless, instantly removed molecules.

Non-Damaging

Safe for sensitive components with no sputter etch.

Flexible Install

Can be installed on a variety of vacuum chambers or load lock.

Push Button Operation

Simple, automated cleaning initiation.

Auto-Tune

No match or gas flow adjustments needed for plasma ignition.

Certified

RoHS, CE, NRTL, TUV and SEMI S2 compliant.

The Evidence is Clear

Drag the slider — carbon contamination before, a pristine surface after an Evactron clean.