Evactron® U50 Plasma De-Contaminator

UHV Vacuum Chamber Cleaning System

Evactron® E50 Plasma De-Contaminators

SEM and FIB Vacuum Chamber Cleaning System

The Evactron E-Series

Efficient and compact remote plasma cleaners

Easy Plasma SoftClean

Effective desktop specimen cleaning

Evactron Zephyr Series

Flexible De-Contaminators for all SEMs and FIBs

Evactron® Plasma Cleaning

The Fastest Way to Pristine

XEI Scientific, Inc. is the recognized leader in downstream plasma cleaning. The Evactron® Plasma De-Contaminator™ is an RF plasma cleaner that reduces hydrocarbon contamination in vacuum chambers. This significantly improves electron microscope imaging and analytical performance.

Evactron plasma cleaners can also be used as an in-situ solution for cleaning EUV and X-ray optics as well as SEM and TEM samples. The Evactron De-Contaminator plasma cleaner can be installed on most vacuum chambers and electron microscopes. Controllers in rack mounted or tabletop configurations are available.

Our Products

Click below to view our world class line of Evactron Plasma De-Contaminators. Our various models meet a wide range of plasma cleaning needs. We invite you to explore and discover which cleaning solution best meets your applications.


  • Hydrocarbon removal in high vacuum chambers
  • Clean SEMs and FIBs for better imaging
  • Improve resolution contrast and scanning time
  • Achieve pristine vacuum conditions
  • Prepare specimens for artifact-free imaging

General and Technical Information



Main: +1-650-369-0133
Fax:  +1-650-363-1659