Evactron E50
EVACTRON E50 E-TC
- RF Power: 75W peak, 50W continuous
- Dual action cleaning using plasma and UV afterglow
- Energy efficient radio frequency hollow cathode plasma (RFHC)
- “POP” ignition at high vacuum
- Tethered touchpad communication package
EVACTRON® E50 PLASMA DE-CONTAMINATORS™
Evactron Zephyr
EVACTRON ZEPHYR™ MODEL 25 PLASMA CLEANER
- Desktop controller
- SEM/FIB chambers or load locks
- 2 operating regimes
- classic mode (roughing pressures)
- T-pump mode (turbomolecular pressures)
EVACTRON ZEPHYR™ MODEL 40 PLASMA CLEANER
- Designed for OEM integration
- SEM chambers or load locks
- Rack mounted controller
EVACTRON ZEPHYR™ MODEL 45 PLASMA CLEANER
- Designed for OEM integration
- Capability to change conditions from the controller
EVACTRON ZEPHYR™ PLASMA CLEANERS
- Designed for SEM/FIB systems
- Fast and efficient hydrocarbon removal
- No damage to samples or sensitive components
- Operates at roughing and turbomolecular pressures
- Remote computer interface
EVACTRON ZEPHYR™ PLASMA CLEANERS
- Designed for SEM/FIB systems
- Fast and efficient hydrocarbon removal
- No damage to samples or sensitive components
- Operates at roughing and turbomolecular pressures
- Remote computer interface
Evactron E-Series
EVACTRON E16
- Compact yet simplified plasma cleaner
- Power Centre controller
- PRS can be flush-mounted on the chamber or the load lock
MODEL ES™
- Designed for OEM integration
- Rack mounted controller
- Horizontal or vertical plasma radical source (PRS)
EVACTRON® E-SERIES PLASMA DE-CONTAMINATORS™
- High cleaning efficiency
- Small footprint/compact plasma radical source (PRS)
- Operates at TMP and turbomolecular pressures
- “Pop” ignition (patent pending)
Evactron SoftClean™ System
EVACTRON E16
- Compact yet simplified plasma cleaner
- Power Centre controller
- PRS can be flush-mounted on the chamber or the load lock
EVACTRON® EASY PLASMA SOFTCLEAN™ (EPSC)
- Cleans SEM/TEM samples
- Cleans TEM grids/sample rods
- Inert sample storage