Evactron E50

Evactron E50

  • RF Power: 75W peak, 50W continuous
  • Dual action cleaning using plasma and UV afterglow
  • Energy efficient radio frequency hollow cathode plasma (RFHC)
  • “Pop” ignition at high vacuum

Evactron Zephyr

  • Designed for SEM/FIB systems
  • Fast and efficient hydrocarbon removal
  • No damage to samples or sensitive components
  • Operates at roughing and turbomolecular pressures
  • Remote computer interface
Evactron Zephyr™ Model 25 Plasma Cleaner

Evactron Zephyr™ Model 25 Plasma Cleaner

  • Desktop controller
  • SEM/FIB chambers or load locks
  • 2 operating regimes
    • classic mode (roughing pressures)
    • T-pump mode (turbomolecular pressures)
Evactron Zephyr™ Model 40 Plasma Cleaner

Evactron Zephyr™ Model 40 Plasma Cleaner

  • Designed for OEM integration
  • SEM chambers or load locks
  • Rack mounted controller
Evactron Zephyr™ Model 45 Plasma Cleaner

Evactron Zephyr™ Model 45 Plasma Cleaner

  • Designed for OEM integration
  • Capability to change conditions from the controller

Evactron E-Series

  • High cleaning efficiency
  • Small footprint/compact plasma radical source (PRS)
  • Operates at TMP and turbomolecular pressures
  • “Pop” ignition (patent pending)
Model EP™

Model EP™

  • Windows and Android GUI software
  • Desktop controller
  • Fits chambers and load locks
  • Vacuum safety interlock
Model ES™

Model ES™

  • Designed for OEM integration
  • Rack mounted controller
  • Horizontal or vertical plasma radical source (PRS)

Evactron SoftClean™ System

  • Cleans SEM/TEM samples
  • Cleans TEM grids/sample rods
  • Inert sample storage
SoftClean EP

SoftClean EP

  • Windows and Android GUI software
  • Optional Safar side loaders (US 8,716,676 B2)
  • Accommodates up to three TEM stage rods

Evactron CombiClean™ System

  • Cleans SEM/TEM samples and SEM chambers from one desktop controller
  • Stores samples and parts after cleaning
  • Uses patented Safar TEM side loaders
CombiClean™ System

CombiClean™ System

  • Cleans SEM/TEM samples and SEM chambers from one desktop controller
  • Stores samples and parts after cleaning
  • Uses patented Safar TEM side loaders