Evactron E50

Evactron E50 with Tablet

Evactron E50

  • RF Power: 75W peak, 50W continuous
  • Dual action cleaning using plasma and UV afterglow
  • Energy efficient radio frequency hollow cathode plasma (RFHC)
  • “Pop” ignition at high vacuum
  • Android tablet/Bluetooth communication package
Evactron E50 TC

EVACTRON E50 E-TC

  • RF Power: 75W peak, 50W continuous
  • Dual action cleaning using plasma and UV afterglow
  • Energy efficient radio frequency hollow cathode plasma (RFHC)
  • “POP” ignition at high vacuum
  • Tethered touchpad communication package

Evactron Zephyr

  • Designed for SEM/FIB systems
  • Fast and efficient hydrocarbon removal
  • No damage to samples or sensitive components
  • Operates at roughing and turbomolecular pressures
  • Remote computer interface
Evactron Zephyr™ Model 25 Plasma Cleaner

Evactron Zephyr™ Model 25 Plasma Cleaner

  • Desktop controller
  • SEM/FIB chambers or load locks
  • 2 operating regimes
    • classic mode (roughing pressures)
    • T-pump mode (turbomolecular pressures)
Evactron Zephyr™ Model 40 Plasma Cleaner

Evactron Zephyr™ Model 40 Plasma Cleaner

  • Designed for OEM integration
  • SEM chambers or load locks
  • Rack mounted controller
Evactron Zephyr™ Model 45 Plasma Cleaner

Evactron Zephyr™ Model 45 Plasma Cleaner

  • Designed for OEM integration
  • Capability to change conditions from the controller

Evactron E-Series

  • High cleaning efficiency
  • Small footprint/compact plasma radical source (PRS)
  • Operates at TMP and turbomolecular pressures
  • “Pop” ignition (patent pending)
Model 20EP

Model 20EP™

  • For cleaning small vacuum chambers
  • Compact desktop controller
  • Sample and chamber cleaning with RF plasma
Model ES™

Model ES™

  • Designed for OEM integration
  • Rack mounted controller
  • Horizontal or vertical plasma radical source (PRS)

Evactron SoftClean™ System

  • Cleans SEM/TEM samples
  • Cleans TEM grids/sample rods
  • Inert sample storage
SoftClean EP

SoftClean EP

  • Android tablet with Bluetooth communication
  • Optional Safar side loaders (US 8,716,676 B2)
  • Accommodates up to three TEM stage rods

Evactron TEM Wand™ System

  • Cleans JEOL TEM/STEM columns and Hitachi in-lens SEM chambers
  • Fully adjustable ignition and operating pressures
  • Dual action cleaning with plasma and UV afterglow
TEM Wand Controller

TEM Wand™ System

  • Tabletop controller with one-button operation
  • No damage to sensitive components
  • Gas source is air for ease of use and low cost operation