Products
Evactron® E16
Compact, simplified plasma cleaner for beam instruments
The Evactron E16 De-Contaminator is a compact yet simplified plasma cleaner for Electron and Ion Beam Instrument load locks such as SEMs, TEMs, FIBs, and sample preparation chambers. The E16 delivers gentle and effective cleaning for superior resolution and imaging plus improved detector and probe sensitivity that are compromised by contamination.
New design features of the Evactron E16 Plasma Radical Source (PRS) include a unique flush-mounting flange and compact size to fit in restricted spaces on a chamber wall. The Evactron E16 Power Centre controller has a small footprint and can be placed horizontally or vertically to conserve space.
Key features
Flush-mounting flange
A unique flush-mount flange fits in restricted spaces on a chamber wall.
Compact PRS
A small Plasma Radical Source built for tight clearances around the instrument.
Space-saving controller
A small-footprint Power Centre, mountable horizontally or vertically.
Touchpad recipes
Cleaning recipes are programmed directly via touchpad.
Auto-tune ignition
Automatically tunes the plasma — no match-tuning or gas-flow adjustments needed.
Turbo-pump (TMP) compatible
Clean with the turbo pump running and no advance venting; TÜV, NRTL and CE certified.
Certified
RoHS, CE, NRTL, TUV and SEMI S2 compliant.
Alternate-gas capability
Runs on air or alternate process gases for tailored cleaning chemistry.
Non-damaging
Gentle downstream cleaning that protects sensitive samples and components.
Dual-action cleaning
Combines plasma and UV afterglow to remove hydrocarbon contamination.
Pop Ignition
Patent-pending ignition technology at high vacuum.
Ready to Restore Peak Performance?
Talk to our team about the right Evactron® system for your chamber.