Products
Evactron® E16
Compact, simplified plasma cleaner for beam instruments
The Evactron® E16 De-Contaminator is a compact yet simplified plasma cleaner for Electron and Ion Beam Instrument load locks such as SEMs, TEMs, FIBs,and sample preparation chambers. The E16 delivers gentle and effective cleaning for superior resolution and imaging plus improved detector and probe sensitivity that are compromised by contamination.
New design features of the Evactron® E16 Plasma Radical Source (PRS) include a unique flush-mounting flange and compact size to fit in restricted spaces on a chamber wall. The Evactron® E16 Power Centre controller has a small footprint and can be placed horizontally or vertically to conserve space.
Key features
Flush-mounting flange
A unique flush-mount flange fits in restricted spaces on a chamber wall.
Compact PRS
A small Plasma Radical Source built for tight clearances around the instrument.
Space-saving controller
A small-footprint Power Centre, mountable horizontally or vertically.
Touchpad recipes
Cleaning recipes are programmed directly via touchpad.
Effortless ignition
No match-tuning or gas-flow adjustments needed for plasma ignition.
Turbo-pump compatible & certified
Works with TMP-pumped chambers; TÜV, NRTL and CE certified.
Ready to Restore Peak Performance?
Talk to our team about the right Evactron® system for your chamber.