Products
Evactron® U50
UHV Vacuum Chamber Cleaning System
The Evactron U50 De-Contaminator is a compact, high performance yet simplified plasma cleaner for instruments and chambers designed to operate at UHV conditions. The U50 delivers high power cleaning for removal of hydrocarbon contamination on chamber and sample surfaces.
The compact design of the Evactron U50 Plasma Radical Source (PRS) makes it a versatile solution for either instrument chambers, load locks, or sample prep chambers. The Evactron U50 offers fast, effective, and powerful cleaning over a wide range of pressures, enabling hydrocarbon-free RGA spectra and fast pumpdown time to UHV.
System Features
RF Power
75W peak, 50W continuous power output.
Bakeable design
Withstands bakeout to 150 °C; TMP-compatible with no advance venting.
Dual-action cleaning
Combines plasma and UV afterglow to remove hydrocarbon contamination.
UHV compatibility
Conflat 2.75 flange and a leak rate below 10⁻¹¹ Torr make it UHV-ready.
Energy Efficient
Hollow cathode, capacitive coupled plasma (CCP) technology.
Programmable control
Power, cleaning time, cycle count and recipes are all user-programmable.
Fast cleaning
100×+ faster than earlier Evactron models, with simple push-button operation.
Alternative Gases
Run a range of process gases to tailor the cleaning chemistry to your application.
Wide Pressure Range
Operation from 0.3 Pa (2 mTorr) to 80 Pa (600 mTorr).
External Interlock
Optional external interlock connection for safety.
TMP Compatible
No advance venting needed for operation.
Pop Ignition
Patent-pending ignition technology at high vacuum.
Efficient Free-Radicals
Gas radicals immediately attack hydrocarbon bonds, producing harmless, instantly removed molecules.
Autotune Ignition
No match or gas flow adjustments needed for plasma ignition.
Non-Damaging
Safe for sensitive components with no sputter etch.
Flexible Install
Can be installed on a variety of vacuum chambers or load lock.
Push Button Operation
Simple, automated cleaning initiation.
Certified
RoHS, CE, NRTL, TUV and SEMI S2 compliant.
Ready to Restore Peak Performance?
Talk to our team about the right Evactron® system for your chamber.