Documents

Theory

How the Classic Evactron De-Contaminator cleans SEMs and FIBs

FAQ

Classic Evactron plasma operation

E-Series FAQ

FAQ about the new Evactron Turbo Plasma Cleaning

Cleaning Notes

Operations and plasma process notes about the Evactron De-Contaminator

Science Papers

Scientific publications and conference presentation about Evactron plasma cleaning

CE and TÜV Certifications

CE and TÜV certificates for the various devices.