Cleaning of Capped Multi-Layer Samples and Cleaning with Hydrogen using the Evactron® De-Contaminator
Christopher G. Morgan and Ronald Vane*, XEI Scientific, Inc., 1755 E. Bayshore Blvd., Redwood City, CA Presentation at the EUV Lithography Workshop, June 2011, Maui, Hawaii Carbon contamination on extreme ultraviolet (EUV) optics reduces their reflectivity. Further...Upcoming Events
May
30
Tue
all-day
EIPBN 2023
@ Hilton San Francisco Union Square
EIPBN 2023
@ Hilton San Francisco Union Square
May 30 – Jun 2 all-day
The international EIPBN conference is recognized as the premier gathering of scientists and engineers who are dedicated to electron, ion and photon lithography, imaging and analysis; atomically precise fabrication; nanofabrication process technologies and related emerging[...]
Jul
4
Tue
all-day
MMC 2023
@ Manchester Central conference centre
MMC 2023
@ Manchester Central conference centre
Jul 4 – Jul 6 all-day
The Microscience Microscopy Congress (mmc) is back with a bang in 2023! One of the biggest events of its kind in Europe, mmc2023 incorporating EMAG 2023 will bring you the very best in microscopy, imaging[...]
Jul
11
Tue
all-day
Semicon West 2023
@ Moscone Center
Semicon West 2023
@ Moscone Center
Jul 11 – Jul 13 all-day
SEMICON West 2023 is the trade show that connects the extended electronics supply chain under one roof. This platform allows you to establish new contacts and customers, meet business partners and help drive your business[...]
Jul
23
Sun
all-day
Microscopy & Microanalysis 2023 ...
@ Minneapolis Convention Center
Microscopy & Microanalysis 2023 ...
@ Minneapolis Convention Center
Jul 23 – Jul 27 all-day
The M&M [The Microscopy Society of America (MSA) and the Microanalysis Society (MAS)] conference is the largest scientific meeting and gathering of microscopy and microanalysis professionals, academics, technicians, students and exhibitors in the world. Microscopy[...]
Sep
8
Fri
all-day
NSH Convention 2023
@ Baltimore Convention Center
NSH Convention 2023
@ Baltimore Convention Center
Sep 8 – Sep 12 all-day
The NSH Convention forms the largest educational event of its kind working to advance and promote the histology profession. NSH is the premier source of learning, knowledge and future-oriented research for histology professionals. Attendance provides[...]
Oct
3
Tue
all-day
Materials Science & Technology (...
@ Greater Columbus Convention Center
Materials Science & Technology (...
@ Greater Columbus Convention Center
Oct 3 – Oct 4 all-day
The Materials Science & Technology (MS&T) technical meeting and exhibition series is a long-standing, recognized forum for fostering technical innovation at the intersection of materials science, engineering, and application. At MS&T, you can learn from[...]
Oct
16
Mon
all-day
IMAT 2023
@ Huntington Place
IMAT 2023
@ Huntington Place
Oct 16 – Oct 19 all-day
Q. What is IMAT and what will be happening during the conference and expo? The return of ASM Materials Week, anticipating 6,000 attendees, 250 exhibitors and 600 presentations. Comprehensive Technical Programming, bringing together industry, academia[...]
Nov
11
Sat
all-day
Neuroscience 2023
@ Walter E. Washington Convention Center
Neuroscience 2023
@ Walter E. Washington Convention Center
Nov 11 – Nov 15 all-day
Each year, scientists from around the world congregate to discover new ideas, share their research, and experience the best the field has to offer. Attend so you can: present research, network with scientists, attend session[...]
Nov
12
Sun
all-day
ISTFA 2023
@ Phoenix Convention Center
ISTFA 2023
@ Phoenix Convention Center
Nov 12 – Nov 16 all-day
Saving global resources by increasing energy efficiency is among the most significant problems that global society must address today. To achieve this, a major target is developing efficient and reliable power electronics devices for providing[...]
Nov
26
Sun
all-day
MRS Fall Meeting & Exhibit 2023
@ Hynes Convention Center
MRS Fall Meeting & Exhibit 2023
@ Hynes Convention Center
Nov 26 – Dec 1 all-day
The 2023 MRS Fall Meeting & Exhibit is the world’s foremost international scientific gathering for materials research, featuring over 50 symposia and attended by as many as up to 7,000 researchers. The MRS Fall Meeting[...]