Cleaning of Capped Multi-Layer Samples and Cleaning with Hydrogen using the Evactron® De-Contaminator
Christopher G. Morgan and Ronald Vane*, XEI Scientific, Inc., 1755 E. Bayshore Blvd., Redwood City, CA Presentation at the EUV Lithography Workshop, June 2011, Maui, Hawaii Carbon contamination on extreme ultraviolet (EUV) optics reduces their reflectivity. Further...Upcoming Events
Jul
1
Mon
all-day
MMC 2019
@ Manchester Central
MMC 2019
@ Manchester Central
Jul 1 – Jul 4 all-day
The Microscience Microscopy Congress 2019 is set to be as big and as bold as ever with 36 conference sessions, an exhibition with more than 100 companies represented, a brilliant selection of features such as[...]
Jul
9
Tue
all-day
Semicon West 2019
@ Moscone Center
Semicon West 2019
@ Moscone Center
Jul 9 – Jul 11 all-day
SEMICON West is a premier event having proved its hegemony in the semiconductors applications market through proper channeling of products. This event displays products like Cables and busbars, Communication Engineering, Computer and communication technology, Data[...]
Aug
5
Mon
all-day
Microscopy and Microanalysis 2019
@ Oregon Convention Center
Microscopy and Microanalysis 2019
@ Oregon Convention Center
Aug 5 – Aug 8 all-day
Don’t miss out on the premier microscopy education and networking event of the year – Microscopy & Microanalysis 2019 in Portland, Oregon! Don’t miss out! Save the Date and plan to attend Microscopy & Microanalysis[...]
Sep
29
Sun
all-day
MS&T 2019
@ Oregon Convention Center
MS&T 2019
@ Oregon Convention Center
Sep 29 – Oct 3 all-day
Now in its 15th year, MS&T hosts over 3,200 attendees, more than 2,000 presentations, a robust plenary speaker lineup, society based special events, and a collaboration among four leading materials science societies. If you work[...]
Oct
19
Sat
all-day
Neuroscience 2019
@ McCormick Place
Neuroscience 2019
@ McCormick Place
Oct 19 – Oct 23 all-day
Neuroscience 2019, the 49th annual gathering of the Society for Neuroscience, will be held Oct. 19-23 in Chicago. This year’s meeting is expected to attract more than 30,000 industry professionals from over 80 countries. Attendees[...]
Nov
10
Sun
all-day
ISTFA 2019
@ Oregon Convention Center
ISTFA 2019
@ Oregon Convention Center
Nov 10 – Nov 14 all-day
ISTFA 2019 – The advent of Artificial Intelligence and the promise of quantum computing are driving disruptive computing architectures. Neuromorphic chip designs on one hand, and Quantum Bits on the other, still in R&D, will[...]
Dec
1
Sun
all-day
MRS Fall Meeting
@ Hynes Convention Center
MRS Fall Meeting
@ Hynes Convention Center
Dec 1 – Dec 6 all-day
The Materials Research Society (MRS) is an organization of materials researchers worldwide that promotes communication for the advancement of interdisciplinary materials research and technology to improve the quality of life. The 2019 MRS Fall Meeting[...]