Cleaning of Capped Multi-Layer Samples and Cleaning with Hydrogen using the Evactron® De-Contaminator
Christopher G. Morgan and Ronald Vane*, XEI Scientific, Inc., 1755 E. Bayshore Blvd., Redwood City, CA Presentation at the EUV Lithography Workshop, June 2011, Maui, Hawaii Carbon contamination on extreme ultraviolet (EUV) optics reduces their reflectivity. Further...Upcoming Events
Oct
17
Sun
all-day
Materials Science & Technology (...
@ Greater Columbus Convention Center
Materials Science & Technology (...
@ Greater Columbus Convention Center
Oct 17 – Oct 21 all-day
The Materials Science & Technology (MS&T) technical meeting and exhibition is the long-standing, recognized forum for fostering technical innovation at the intersection of materials science, engineering, and application. Each year, MS&T brings together scientists, engineers,[...]
Oct
31
Sun
all-day
ISTFA 2021
@ Hyatt Regency Phoenix
ISTFA 2021
@ Hyatt Regency Phoenix
Oct 31 – Nov 4 all-day
Riding the Wave of System-in-Package (SiP) In the 21st century, the electronic market will be driven by consumers with demands of immediate entertainment, fast access of information, and communications anywhere in a personalized fashion and[...]
Nov
28
Sun
all-day
MRS Fall Meeting & Exhibit 2021
@ Boston Hynes Convention
MRS Fall Meeting & Exhibit 2021
@ Boston Hynes Convention
Nov 28 – Dec 3 all-day
The MRS Fall Meeting & Exhibit has long been considered the key forum to present research to an interdisciplinary and international audience. It provides a window on the future of materials science, and offers an[...]
Dec
7
Tue
all-day
Semicon West 2021
@ Moscone Center
Semicon West 2021
@ Moscone Center
Dec 7 – Dec 9 all-day
HYBRID SEMICON West 2021 offers both a [LIVE] and VIRTUAL environment featuring: KEYNOTES—industry insights and predictions TECHTALKS—in-depth technical information MEET THE EXPERTS THEATER—solutions to industry challenges You’ll experience: Top-quality, timely education with world-class thought leaders[...]
Dec
11
Sat
all-day
ASCB 2021
@ San Diego Convention Center
ASCB 2021
@ San Diego Convention Center
Dec 11 – Dec 15 all-day
The 61st Annual Meeting of the America Society for Cell Biology (ASCB 2021) will take place 11 – 15 December 2021 in San Diego, CA, USA. This global meeting provides a venue to life scientists[...]