Cleaning of Capped Multi-Layer Samples and Cleaning with Hydrogen using the Evactron® De-Contaminator
Christopher G. Morgan and Ronald Vane*, XEI Scientific, Inc., 1755 E. Bayshore Blvd., Redwood City, CA Presentation at the EUV Lithography Workshop, June 2011, Maui, Hawaii Carbon contamination on extreme ultraviolet (EUV) optics reduces their reflectivity. Further...Upcoming Events
Oct
9
Sun
all-day
Materials Science & Technology (...
@ David L. Lawrence Convention Center
Materials Science & Technology (...
@ David L. Lawrence Convention Center
Oct 9 – Oct 13 all-day
The Materials Science & Technology (MS&T) technical meeting and exhibition is the long-standing, recognized forum for fostering technical innovation at the intersection of materials science, engineering, and application. Each year, MS&T brings together scientists, engineers,[...]
Oct
14
Fri
all-day
NSH Convention 2022
@ Reno-Sparks Convention Center
NSH Convention 2022
@ Reno-Sparks Convention Center
Oct 14 – Oct 19 all-day
The NSH Convention forms the largest educational event of its kind working to advance and promote the histology profession. NSH is the premier source of learning, knowledge and future-oriented research for histology professionals. Attendance provides[...]
Oct
31
Mon
all-day
ISTFA 2022
@ The Westin Pasadena
ISTFA 2022
@ The Westin Pasadena
Oct 31 – Nov 2 all-day
The demand for higher performance and lower power-consumption microelectronic devices has driven semiconductor technology to shrink continuously according to Moore’s Law. Furthermore, for latest technologies in nano realm, a new set of disruptive development in[...]
Nov
12
Sat
all-day
Neuroscience 2022
@ San Diego Convention Center
Neuroscience 2022
@ San Diego Convention Center
Nov 12 – Nov 16 all-day
Each year, scientists from around the world congregate to discover new ideas, share their research, and experience the best the field has to offer. Attend so you can: present research, network with scientists, attend session[...]
Nov
27
Sun
all-day
MRS Fall Meeting & Exhibit 2022
@ Hynes Convention Center
MRS Fall Meeting & Exhibit 2022
@ Hynes Convention Center
Nov 27 – Dec 2 all-day
The 2022 MRS Fall Meeting will be held November 27 through December 2, 2022, in Boston, Massachusetts, at the Hynes Convention Center and adjacent Sheraton Boston Hotel. The world’s foremost international scientific gathering for materials[...]
Dec
3
Sat
all-day
ASCB 2022
@ Washington, DC
ASCB 2022
@ Washington, DC
Dec 3 – Dec 7 all-day
Cell Bio, the joint meeting of the American Society for Cell Biology (ASCB) and European Molecular Biology Organization (EMBO), is an arena to showcase a diverse global community of the brightest minds in cell biology.[...]