TEM Wand™ System

TEM Wand™ System

Tabletop controller with one-button operation No damage to sensitive components Gas source is air for ease of use and low cost operation
SoftClean EP

SoftClean EP

Android tablet with Bluetooth communication Optional Safar side loaders (US 8,716,676 B2) Accommodates up to three TEM stage rods
Model ES™

Model ES™

Designed for OEM integration Rack mounted controller Horizontal or vertical plasma radical source (PRS)
EVACTRON E50 E-TC

EVACTRON E50 E-TC

RF Power: 75W peak, 50W continuous Dual action cleaning using plasma and UV afterglow Energy efficient radio frequency hollow cathode plasma (RFHC) “POP” ignition at high vacuum Tethered touchpad communication package
Evactron E50

Evactron E50

RF Power: 75W peak, 50W continuous Dual action cleaning using plasma and UV afterglow Energy efficient radio frequency hollow cathode plasma (RFHC) “Pop” ignition at high vacuum Android tablet/Bluetooth communication package