Yuji Tanaka1, Takako Yamashita, and Masayasu Nagoshi
ABSTRACT: Hydrocarbon contamination introduced during point, line and map analyses in a field emission electron probe microanalysis (FE-EPMA) was investigated to enable reliable quantitative analysis of trace amounts of carbon in steels. The increment of contamination on pure iron in point analysis is proportional to the number of iterations of beam irradi- ation, but not to the accumulated irradiation time.