Alice Bastos Fanta⁎, Matteo Todeschini, Andrew Burrows, Henri Jansen, Christian D. Damsgaard, Hossein Alimadadi, Jakob B. Wagner

ABSTRACT: Transmission Kikuchi diffraction (TKD) facilitates automated orientation mapping of thin films in scanning electron microscopes (SEM). In this study TKD is applied for the first time to perform in-situ annealing ex- periments on gold thin films deposited on a MEMS-based heating system. The very local heating associated with this system enables reliable TKD measurements at elevated temperatures without notable disturbance from infrared radiation. The dewetting of an Au thin film into Au nanoparticles upon heating is followed with or- ientation mapping in a temperature range between 20 °C and 900 °C. The local thickness variation associated with the dewetting is observed qualitatively by observing the intensity of the transmitted beam, which decreases as the film thickness increases locally. The results of this study reveal that TKD is a well suited technique to study thin-film stability and solid state dewetting. Moreover, the outcome of this methodological study provides a baseline for further in-situ crystallographic studies of electron transparent samples in the SEM.

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