A Study of the Effectiveness of the Removal of Hydrocarbon Contamination by Oxidative Cleaning Inside the SEM
Neal Sullivan*, Tung Mai*, Scott Bowdoin*, and Ronald Vane**, *Schlumberger Technologies, 45 Winthrop St., Concord, MA **XEI Scientific, Inc., Redwood City, CA Presentation at Microscopy and Microanalysis Meeting, August, 2002, Quebec City, Canada (Microscopy&...
Contamination Specification for Dimensional Metrology SEMs
András E. Vladár, K. P. Purushotham and Michael T. Postek, NIST, Gaithersburg, MD Presented at SPIE Advanced Microlithograpy Feb 2008, San Jose, CA Electron beam-induced contamination is becoming one of the most bothersome problems of the scanning electron...Upcoming Events
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