Does Your SEM Really Tell the Truth? – How Would You Know? Part 4

Michael T. Postek and András Vladár , NIST, Gaithersburg, MD Proc SPIE Int. Soc. Opt. Eng. Vol. 9636: 963605 (2015) Abstract: This is the fourth part of a series of tutorial papers discussing various causes of measurement uncertainty in scanned particle beam...

Does Your SEM Really Tell the Truth? – How Would You Know? Part 2

Michael T. Postek, András Vladár and Kavuri P. Purushotham , NIST, Gaithersburg, MD SCANNING Vol. 36: 347-355 (2014) Summary: The scanning electron microscope (SEM) has gone through a tremendous evolution to become indispensable for many and diverse scientific and...

Does Your SEM Really Tell the Truth? – How Would You Know? Part 1

Michael T. Postek and András Vladár , NIST, Gaithersburg, MD SCANNING Vol. 35: 355-361 (2013) Summary: The scanning electron microscope (SEM) has gone through a tremendous evolution to become a critical tool for many and diverse scientific and industrial applications....

Active Monitoring and Control of Electron Beam Induced Contamination

András E. Vladár*, Michael T. Postek* and Ronald Vane**, *National Institute of Standards and Technology, Gaithersburg, MD **XEI Scientific, Inc., Redwood City, CA Presentation at SPIE Microlilthography Conference Feb 27-28, 2001; Proc SPIE, Vol. 4344(2001): 835. View...

A Study of the Effectiveness of the Removal of Hydrocarbon Contamination by Oxidative Cleaning Inside the SEM

Neal Sullivan*, Tung Mai*, Scott Bowdoin*, and Ronald Vane**, *Schlumberger Technologies, 45 Winthrop St., Concord, MA **XEI Scientific, Inc., Redwood City, CA Presentation at Microscopy and Microanalysis Meeting, August, 2002, Quebec City, Canada (Microscopy&...