XEI Scientific Awarded a Patent for its External Hollow Cathode Design
Redwood City, CA. – For immediate release – XEI Scientific Inc. Receives US Patent 10,486,236 for a Plasma Device with an External RF Hollow Cathode for Plasma Cleaning of High Vacuum Systems used in Evactron® E-50 model and U50 model plasma cleaners. The Evactron E50 model was introduced in 2017 and is now XEI‘s most popular in-situ downstream plasma cleaner for SEMs, with its easy plasma ignition directly from high vacuum using the “POP” ignition process developed by XEI Scientific. The design places the electrode outside the plasma to eliminate particulate production. This efficient hollow cathode plasma radical source is able to operate with 50 Watts of RF power to generate plasma rather than heat and plasma as in ICP-type plasma cleaners.
The E50 plasma cleaner generates more neutral radicals to clean faster, more completely, and in less time than the Classic and Zephyr Evactron models offered previously. Operating parameters can be set by commands from the SEM host computer, from a wireless android tablet, or from a wired touchpad module. Additionally, a start commend can be issued by pressing a front panel push button. The Evactron E50 model has been in production for over 2 years and is now the most popular Evactron plasma cleaner because of its performance, ease of use, and cost effectiveness.
PDF of the Patent
XEI Scientific Inc. invented the Evactron De-Contaminator in 1999 as the first plasma cleaner to use a downstream cleaning process to remove carbon from electron microscopes. A proprietary plasma source uses air to produce oxygen radicals for oxidation of carbon compounds for removal by the pumps. Carbon-free-vacuum produces the highest quality images and analytical results from SEMs and other vacuum analytical instruments. XEI innovations also include a unique RF plasma generator, a patented RF electrode, and easy start programmed plasma cleaning. All XEI products come with a 5 year limited warranty and are compliant with CE, NRTL, and Semi-S2 safety standards. XEI offers a variety of Evactron® decontamination systems to meet user needs and >3000 installations around the world.