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Specifications

RF Power

5–16 W continuous

Plasma Technology

Energy-efficient RF hollow-cathode (RFHC)

PRS (W×H×D)

2.5″ × 2.125″ × 3.75″ (6.3 × 5.4 × 9.5 cm)

Power Centre (W×H×D)

12.25″ × 3.5″ × 9.34″ (31 × 8.9 × 23.7 cm)

Controller

Touchpad programming of cleaning recipes

Wide Pressure Range

1 Torr – 1.0 × 10⁻³ Torr

Air flow

Fixed input, no adjustments needed

Compatibility

Turbo pump compatible

Mounting

PRS can be flush-mounted on the chamber or the load lock

Self Ignition

No match or gas flow adjustments needed for plasma ignition

Certification

TÜV, NRTL and CE safety certified