XEI Scientific Inc.'s
Evactron® SoftClean™ Chamber
|
Download our standard catalog
|
XEI Scientific, Inc. manufactures the Evactron® De-Contaminator, a compact remote plasma cleaning device which can remove hydrocarbon contamination from vacuum chambers such as scanning electron microscopes (SEMs). XEI Scientific also manufactures a plasma cleaner which can be inserted in a transmission electron microscope (TEM) and a low power 13.56 MHz RF generator.
PRICING: Contact local distributors, listed in our Sales page.
See our full list of products here.
|
New EUV Product
|
|
Evactron SoftClean Chamber
Download the Evactron SoftClean Chamber Spec Sheet.pdf
|
|
Electron microscope image quality is greatly improved by the removal of hydrocarbon (H/C) contamination from microscope chambers and from specimen mounts, specimen holders, and the specimens themselves. XEI Scientific developed the Evactron De-Contaminator to clean microscope chambers of their residual H/C contamination. The Evactron SoftClean Chamber extends the ability to pre-clean specimens, specimen mounts, and holders with the proven downstream plasma ashing process before examination in the chamber, thus insuring high image quality. The Evactron SoftClean Chamber can also be used as a specimen storage system, keeping samples in a clean environment. The downstream plasma process used in the Evactron SoftClean Chamber is gentle, yet very effective at removing H/C contamination. Sputter etching by other plasma cleaners can damage specimens through exposure to energetic ions and heat. The Evactron SoftClean Chamber uses reactive gas radicals to remove H/C from specimen surfaces by chemical etch, preserving critical sample fine structure. This downstream etching process breaks down problematic H/C residues into smaller molecules such as CO2, H2O and CO, which are easily pumped out of the chamber.
Specifications:
• Benchtop Plasma Cleaning
• Chamber dimensions 8.5” (216 mm) diameter x
5 .5” (140 mm) height
• 4 KF 40 and 1 KF 16 vacuum mounting flanges with
manual shut-off valve for vacuum port
• Adaptor flanges for all major manufacturers of TEM
sample holders available
• 1 venting port and a Plated Aluminum lid with 5.5"
diameter glass viewing port
• Just use air for oxygen radicals, or use other gases
for alternative plasma processes
• Shipping — 12 lb (6 kg)
• 5 year warranty
|
|
|
|
Search Engine Topics: Evactron De-Contaminator, Evactron CombiClean System, CombiClean, All-in-one Plasma Cleaning System for SEMs, FIBs, TEMs, Anti-Contamination Accessory for Electron Microscopes, Electron Microscope Decontaminators, Hydrocarbon and Organic Contamination Control in Vacuum Systems, Black Square and Raster Burn Control in SEMs, Stop Oil Drip from X-ray windows, Plasma cleaning of high vacuum systems, FIB, and SEM, Glow Discharge Cleaning, Hydrocarbon Removal in vacuum chambers, SEM Anti-Contaminator and SEM Anticontaminator, RF plasma cleaning and RF plasma ashing of vacuum chambers, Organic Contamination control and removal, Cleaning Organics with an anticontaminator, Anticontamination system for SEM and FIBs, EDX and EDS window cleaning, RF Plasma Ashing in Electron Microscopes, Microscope Contamination Solution!
|
|
