Barbara Armbruster1, Stefan Diller2, James Grande3 and Ronald Vane1
1. XEI Scientific, Inc., Redwood City, CA USA
2. Stefan Diller – Scientific Photography, Wuerzburg, Germany
3. General Electric Global Research, Niskayuna, NY USA
XEI has recently invented a new plasma generation technology with RF external hollow cathode excitation. This new Evactron E50 plasma cleaner operates from a lower base pressure compared to previous models and rapidly removes most hydrocarbons from a vacuum chamber. At turbo pump pressures, Evactron cleaning becomes faster and the downstream plasma afterglow spreads throughout the chamber, removing contamination and significantly shortening pump down time, allowing for high throughput of sample processing and analysis.
