J. Saujauddin, T. Niemi, T. Lundquist, B. Niu, M. Cable
ABSTRACT:
anoprobing has become indispensable for the characterization of FEOL processes and FinFET performance in early process development and HVM yield improvements [1- 3]. When the processes and transistor performance are fully characterized such as transistor level I-V curves (performance) and leakage (power efficiency), the risk to process development is greatly reduced, providing high impact to the HVM-product performances.
