J. Saujauddin, T. Niemi, T. Lundquist, B. Niu, M. Cable

anoprobing has become indispensable for the characterization of FEOL processes and FinFET performance in early process development and HVM yield improvements [1- 3]. When the processes and transistor performance are fully characterized such as transistor level I-V curves (performance) and leakage (power efficiency), the risk to process development is greatly reduced, providing high impact to the HVM-product performances.

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