The Evactron® ES Plasma De-Contaminator is designed for OEM integration on high vacuum scientific and analytical instruments. This simplified Evactron Plasma Radical Source (PRS) utilizes air plasma oxygen radicals and UV afterglow to reduce hydrocarbon contamination, delivering results quickly and efficiently. Its very small size and low power make it desirable for integration on small volume vacuum instruments such a vacuum coaters and mass spectrometers.

Specifications

• SEM/FIB host directed control
• 2U rack mount controller for system integration
• Optional hardware interlock
• Small compact Plasma Radical Source (PRS)
• RF Power: 10 – 20 Watts at 13.56 MHz CCP
• 100-240 VAC 50/60 Hz input
• CE/TUV/NRTL safety certified
• RoHS Compliant