Evactron® Model ES Plasma De-Contaminator™

The Evactron ES Plasma De-Contaminator was designed for OEM integration for SEM, FIB, High vacuum, and other analytical instruments. This simplified Evactron Plasma Radical Source (PRS) utilizes air plasma afterglow to reduce hydrocarbon contamination, delivering results quickly and efficiently.

 

System Specifications

  • SEM/FIB host directed control
  • 2U rack mount controller for system integration
  • Optional hardware interlock
  • Small compact Plasma Radical Source (PRS)
  • RF Power: 10 – 20 Watts at 13.56 MHz CCP
  • 100-240 VAC 50/60 Hz input
  • CE/TUV/NRTL safety certified
  • RoHS Compliant