Layer Control of WSe2 via Selective Surface Layer Oxidation

Layer Control of WSe2 via Selective Surface Layer Oxidation

Zhen Li, Sisi Yang, Rohan Dhall, Ewa Kosmowska, Haotian Shi, Ioannis Chatzakis, and Stephen B. Cronin ABSTRACT: We report Raman and photoluminescence spectra of mono- and few-layer WSe2 and MoSe2 taken before and after exposure to a remote oxygen plasma. For bilayer...
The Use of Oxygen in SEM Plasma Cleaning Equipment

The Use of Oxygen in SEM Plasma Cleaning Equipment

Thomas O. Mueller, J. Cowan, and E. Swanson, ON Semiconductor, Gresham Failure Analysis Laboratory, Gresham, OR Poster Presentation at Microscopy and Microanalysis Meeting, August, 2007, Ft. Lauderdale, FL View PDF document...