The Use of Oxygen in SEM Plasma Cleaning Equipment
Thomas O. Mueller, J. Cowan, and E. Swanson, ON Semiconductor, Gresham Failure Analysis Laboratory, Gresham, OR Poster Presentation at Microscopy and Microanalysis Meeting, August, 2007, Ft. Lauderdale, FL View PDF document here.
Comparing the Effects of Different Gas Mixtures and Vacuum Chamber Geometries on the Evactron Cleaning Process
Christopher G. Morgan and Ronald Vane, XEI Scientific, Inc., Redwood City, CA Poster Presentation at Microscopy and Microanalysis Meeting, August 2008, Albuquerque, NM. Using a quartz crystal microbalance (QCM), the effectiveness of the Evactron® process has been...
Removal of Carbon Contamination using Hydrogen with Low-Power Downstream Plasma Cleaning
C. G. Morgan and R. Vane, XEI Scientific, Inc., Redwood City, CA Poster Presentation at SPIE Advanced Lithography Conference, March 2011, San Jose, CA Carbon contamination on extreme ultraviolet (EUV) optics reduces their reflectivity. The use of a commercially...Upcoming Events
Oct
19
Sat
all-day
Neuroscience 2019
@ McCormick Place
Neuroscience 2019
@ McCormick Place
Oct 19 – Oct 23 all-day
Neuroscience 2019, the 49th annual gathering of the Society for Neuroscience, will be held Oct. 19-23 in Chicago. This year’s meeting is expected to attract more than 30,000 industry professionals from over 80 countries. Attendees[...]
Nov
10
Sun
all-day
ISTFA 2019
@ Oregon Convention Center
ISTFA 2019
@ Oregon Convention Center
Nov 10 – Nov 14 all-day
ISTFA 2019 – The advent of Artificial Intelligence and the promise of quantum computing are driving disruptive computing architectures. Neuromorphic chip designs on one hand, and Quantum Bits on the other, still in R&D, will[...]
Dec
1
Sun
all-day
MRS Fall Meeting
@ Hynes Convention Center
MRS Fall Meeting
@ Hynes Convention Center
Dec 1 – Dec 6 all-day
The Materials Research Society (MRS) is an organization of materials researchers worldwide that promotes communication for the advancement of interdisciplinary materials research and technology to improve the quality of life. The 2019 MRS Fall Meeting[...]