The Use of Oxygen in SEM Plasma Cleaning Equipment
Thomas O. Mueller, J. Cowan, and E. Swanson, ON Semiconductor, Gresham Failure Analysis Laboratory, Gresham, OR Poster Presentation at Microscopy and Microanalysis Meeting, August, 2007, Ft. Lauderdale, FL View PDF document here.
Comparing the Effects of Different Gas Mixtures and Vacuum Chamber Geometries on the Evactron Cleaning Process
Christopher G. Morgan and Ronald Vane, XEI Scientific, Inc., Redwood City, CA Poster Presentation at Microscopy and Microanalysis Meeting, August 2008, Albuquerque, NM. Using a quartz crystal microbalance (QCM), the effectiveness of the Evactron® process has been...
Removal of Carbon Contamination using Hydrogen with Low-Power Downstream Plasma Cleaning
C. G. Morgan and R. Vane, XEI Scientific, Inc., Redwood City, CA Poster Presentation at SPIE Advanced Lithography Conference, March 2011, San Jose, CA Carbon contamination on extreme ultraviolet (EUV) optics reduces their reflectivity. The use of a commercially...Upcoming Events
Feb
24
Sun
all-day
SPIE Advanced Lithography Meeting
@ San Jose Convention Center
SPIE Advanced Lithography Meeting
@ San Jose Convention Center
Feb 24 – Feb 28 all-day
Join us in 2019 Hear the latest advancements in optical lithography, metrology, or EUV. Join us at the meeting where leaders come to solve challenges in lithography, patterning technologies, and materials for the semiconductor industry.
Mar
2
Sat
all-day
Biophysical Society Meeting
@ The Baltimore Convention Center
Biophysical Society Meeting
@ The Baltimore Convention Center
Mar 2 – Mar 6 all-day
BPS19 – 63rd Annual Meeting of The Biophysical Society is organized by Biophysical Society (BPS) and will be held from Mar 02 – 06, 2019 at The Baltimore Convention Center, Baltimore, Maryland, United States of[...]
Apr
22
Mon
all-day
MRS Spring Meeting
@ Phoenix Convention Center
MRS Spring Meeting
@ Phoenix Convention Center
Apr 22 – Apr 26 all-day
The 2019 MRS Spring Meeting & Exhibit is the key forum to present research to an interdisciplinary and international audience. It provides a window on the future of materials science, and offers an opportunity for[...]
Jul
1
Mon
all-day
MMC 2019
@ Manchester Central
MMC 2019
@ Manchester Central
Jul 1 – Jul 4 all-day
The Microscience Microscopy Congress 2019 is set to be as big and as bold as ever with 36 conference sessions, an exhibition with more than 100 companies represented, a brilliant selection of features such as[...]
Jul
9
Tue
all-day
Semicon West 2019
@ Moscone Center
Semicon West 2019
@ Moscone Center
Jul 9 – Jul 11 all-day
SEMICON West is a premier event having proved its hegemony in the semiconductors applications market through proper channeling of products. This event displays products like Cables and busbars, Communication Engineering, Computer and communication technology, Data[...]
Aug
5
Mon
all-day
Microscopy and Microanalysis 2019
@ Oregon Convention Center
Microscopy and Microanalysis 2019
@ Oregon Convention Center
Aug 5 – Aug 8 all-day
Don’t miss out on the premier microscopy education and networking event of the year – Microscopy & Microanalysis 2019 in Portland, Oregon! Don’t miss out! Save the Date and plan to attend Microscopy & Microanalysis[...]
Sep
29
Sun
all-day
MS&T 2019
@ Oregon Convention Center
MS&T 2019
@ Oregon Convention Center
Sep 29 – Oct 3 all-day
Now in its 15th year, MS&T hosts over 3,200 attendees, more than 2,000 presentations, a robust plenary speaker lineup, society based special events, and a collaboration among four leading materials science societies. If you work[...]
Oct
19
Sat
all-day
Neuroscience 2019
@ McCormick Place
Neuroscience 2019
@ McCormick Place
Oct 19 – Oct 23 all-day
Neuroscience 2019, the 49th annual gathering of the Society for Neuroscience, will be held Oct. 19-23 in Chicago. This year’s meeting is expected to attract more than 30,000 industry professionals from over 80 countries. Attendees[...]
Nov
10
Sun
all-day
ISTFA 2019
@ Oregon Convention Center
ISTFA 2019
@ Oregon Convention Center
Nov 10 – Nov 14 all-day
ISTFA 2019 – The advent of Artificial Intelligence and the promise of quantum computing are driving disruptive computing architectures. Neuromorphic chip designs on one hand, and Quantum Bits on the other, still in R&D, will[...]
Dec
1
Sun
all-day
MRS Fall Meeting
@ Hynes Convention Center
MRS Fall Meeting
@ Hynes Convention Center
Dec 1 – Dec 6 all-day
The Materials Research Society (MRS) is an organization of materials researchers worldwide that promotes communication for the advancement of interdisciplinary materials research and technology to improve the quality of life. The 2019 MRS Fall Meeting[...]