Plasma Cleaning with Alternate Gases
Ronald Vane, Ewa Kosmowska and Michael Cable ABSTRACT: The Evactron remote plasma cleaner was introduced in 1999 for cleaning SEM chambers and stages with air flowing through a hollow cathode RF plasma that produces oxygen radicals for chemical etching. Since the...
Macro- and microscale investigations of hydrogen embrittlement in X70 pipeline steel
M. Asadipoora, A. Pourkamali Anarakia, J. Kadkhodapoura, S.M.H. Sharifib, A. Barnoushc ABSTRACT: The effect of hydrogen on the mechanical properties of X70 pipeline steel was investigated by a combination of macro- and microscale approaches. Various tensile tests...
Layer Control of WSe2 via Selective Surface Layer Oxidation
Zhen Li, Sisi Yang, Rohan Dhall, Ewa Kosmowska, Haotian Shi, Ioannis Chatzakis, and Stephen B. Cronin ABSTRACT: We report Raman and photoluminescence spectra of mono- and few-layer WSe2 and MoSe2 taken before and after exposure to a remote oxygen plasma. For bilayer...
The Use of Oxygen in SEM Plasma Cleaning Equipment
Thomas O. Mueller, J. Cowan, and E. Swanson, ON Semiconductor, Gresham Failure Analysis Laboratory, Gresham, OR Poster Presentation at Microscopy and Microanalysis Meeting, August, 2007, Ft. Lauderdale, FL View PDF document here.Upcoming Events
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ISTFA 2022
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The demand for higher performance and lower power-consumption microelectronic devices has driven semiconductor technology to shrink continuously according to Moore’s Law. Furthermore, for latest technologies in nano realm, a new set of disruptive development in[...]
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Neuroscience 2022
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Each year, scientists from around the world congregate to discover new ideas, share their research, and experience the best the field has to offer. Attend so you can: present research, network with scientists, attend session[...]
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@ Hynes Convention Center
MRS Fall Meeting & Exhibit 2022
@ Hynes Convention Center
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@ Washington, DC
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@ Washington, DC
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