Tungsten Probe Tip Cleaning

J. Saujauddin, T. Niemi, T. Lundquist, B. Niu, M. Cable ABSTRACT: anoprobing has become indispensable for the characterization of FEOL processes and FinFET performance in early process development and HVM yield improvements [1- 3]. When the processes and transistor...

Plasma Cleaning with Alternate Gases

Ronald Vane, Ewa Kosmowska and Michael Cable ABSTRACT: The Evactron remote plasma cleaner was introduced in 1999 for cleaning SEM chambers and stages with air flowing through a hollow cathode RF plasma that produces oxygen radicals for chemical etching. Since the...

The Benefits of Plasma Cleaning for TKD/EBSD Analysis

Barbara Armbruster, Michael Cable, Ewa Kosmowska, Kim Larsen, Patrick Trimby and Ronald Vane ABSTRACT: Plasma cleaners have been recognized as a necessary accessory for rapidly and effectively eliminating hydrocarbon contamination from vacuum chambers and samples....

Influence of spinodal decomposition and fcc → w phase transformation on global and local mechanical properties

Michael Tkadletza, Alexandra Lechnera, Nina Schalka, Bernhard Sartoryc, Andreas Starkd, Norbert Schelle, Christian Saringer, Christian Mitterer, Christoph Czettl ABSTRACT: Recently, it was shown that annealing of nanolamellar CVD fcc-Ti 1-x Al x N at temperatures of...

Structure evolution and mechanical properties of hard tantalum diboride films

Viktor Šroba, Tomáš Fiantok, Martin Truchlý, Tomáš Roch, Miroslav Zahoran, Branislav Grančič, Peter Švec, Jr., Štefan Nagy, Vitalii Izai, Peter Kúš and Marián Mikula ABSTRACT: Tantalum diboride (TaB2 ) belonging to the ultrahigh temperature ceramics family is proving...