20th Anniversary of Evactron® Plasma Cleaners for SEMs and FIBs

20th Anniversary of Evactron® Plasma Cleaners for SEMs and FIBs

Ronald Vane1, Barbara Armbruster1, Michael Cable1, Ewa Kosmowska1 and George Safar1 1. XEI Scientific, Inc., Redwood City, CA, USA XEI Scientific invented the Evactron De-Contaminator, a practical plasma cleaning system for Scanning Electron Microscopes (SEMs) in 1999...