Advancements of Evactron® Plasma Cleaning of Moxtek® X-ray Windows

Ewa Kosmowska1, Michael Almond2, Josh Wong2, Brian Law2, Barbara Armbruster1 and Ronald Vane1 1. XEI Scientific, Inc., Redwood City, CA, USA. 2. Moxtek Inc., Orem, UT, USA. XEI Scientific Inc. is a recognized manufacturer of plasma cleaners that have been proven to be...

Visualizing Evactron® Turbo PlasmaTM Cleaning in nanoflight® Movies

Barbara Armbruster1, Stefan Diller2, James Grande3 and Ronald Vane1 1. XEI Scientific, Inc., Redwood City, CA USA 2. Stefan Diller – Scientific Photography, Wuerzburg, Germany 3. General Electric Global Research, Niskayuna, NY USA XEI has recently invented a new...

20th Anniversary of Evactron® Plasma Cleaners for SEMs and FIBs

Ronald Vane1, Barbara Armbruster1, Michael Cable1, Ewa Kosmowska1 and George Safar1 1. XEI Scientific, Inc., Redwood City, CA, USA XEI Scientific invented the Evactron De-Contaminator, a practical plasma cleaning system for Scanning Electron Microscopes (SEMs) in 1999...

Using a Residual Gas Analyzer to Monitor Plasma Cleaning of SEM Chambers and Specimens

Ronald Vane1 and Michael Cable1 1. XEI Scientific Inc, Redwood City, CA. Residual Gas Analyzers (RGA) are powerful tools to measure and identify gases and contaminants in vacuum chambers. XEI Scientific has manufactured Evactron® plasma cleaners for SEMs since 1999 to...

Environmental Contamination Sources and Control in High Resolution Scanning Electron Microscopy

Ronald Vane and Vince Carlino, XEI Scientific, Inc., Redwood City, CA Presentation at Microscopy and Microanalysis Meeting, August, 2005, Honolulu, HI Hydrocarbon (HC) background and contamination is hard to avoid in our carbon based world. Even with the most careful...