ABSTRACT: It is well known that carbon present in scanning electron microscopes (SEM), Focused ion beam (FIB) systems and FIB-SEMs, causes imaging artefacts and influences the quality of TEM lamellae or structures fabricated in FIB-SEMs. The severity of such effects...
Ewa Kosmowska1, Michael Almond2, Josh Wong2, Brian Law2, Barbara Armbruster1 and Ronald Vane1 1. XEI Scientific, Inc., Redwood City, CA, USA. 2. Moxtek Inc., Orem, UT, USA. XEI Scientific Inc. is a recognized manufacturer of plasma cleaners that have been proven to be...
Barbara Armbruster1, Stefan Diller2, James Grande3 and Ronald Vane1 1. XEI Scientific, Inc., Redwood City, CA USA 2. Stefan Diller – Scientific Photography, Wuerzburg, Germany 3. General Electric Global Research, Niskayuna, NY USA XEI has recently invented a new...
Ronald Vane1, Barbara Armbruster1, Michael Cable1, Ewa Kosmowska1 and George Safar1 1. XEI Scientific, Inc., Redwood City, CA, USA XEI Scientific invented the Evactron De-Contaminator, a practical plasma cleaning system for Scanning Electron Microscopes (SEMs) in 1999...
Ronald Vane1 and Michael Cable1 1. XEI Scientific Inc, Redwood City, CA. Residual Gas Analyzers (RGA) are powerful tools to measure and identify gases and contaminants in vacuum chambers. XEI Scientific has manufactured Evactron® plasma cleaners for SEMs since 1999 to...
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