Immobilization and Removal of Hydrocarbon Contamination Using the Evactron®De-Contaminator
Ronald Vane, XEI Scientific, Inc., Redwood City, CA Presentation at Microscopy and Microanalysis Meeting, July-August, 2006, Chicago, IL Comparison of Residual Gas Analysis results on the removal of volatile components and visual observance of the removal of...
Effect of Cleaning Parameters on Cleaning Effectiveness in a SEM Equipped with an Oxygen Plasma Etching Device
R. Garcia*, A.D. Batchelor*, C.B. Mooney*, A.D. Garetto*, V.L. Carlino**, R. Vane**, and D.P. Griffiths *Materials Science and Engineering Department and Analytical Instrumentation Facility, North Carolina State University, Raleigh, NC; **XEI Scientific, Redwood City,...
Quantification of Contamination Using Quartz Crystal Thickness Monitors
Christopher G. Morgan, Mark M. Gleason and Ronald Vane, XEI Scientific, Inc., Redwood City, CA Poster Presentations at Microscopy and Microanalysis Meeting, August, 2007, Ft. Lauderdale, FL Quartz crystal microbalances (QCMs) are a standard tool for vacuum deposition...
Using Thickness Monitor to Measure Contaminant Removal by Evactron Cleaning as a Function of Operating Parameters
Christopher G. Morgan, Mark M. Gleason and Ronald Vane, XEI Scientific, Inc., Redwood City, CA Poster Presentations at Microscopy and Microanalysis Meeting, August, 2007, Ft. Lauderdale, FL Quartz crystal microbalances (QCMs) are a standard tool for vacuum deposition...Upcoming Events
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SPIE Advanced Lithography Meeting
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The Materials Research Society (MRS) is an organization of materials researchers worldwide that promotes communication for the advancement of interdisciplinary materials research and technology to improve the quality of life. The 2019 MRS Fall Meeting[...]