XEI Scientific, Inc.

 Plasma Cleaner for Electron Microscopes
and High Vacuum Systems

The EVACTRON® Anti-Contaminator and De-Contaminator
Stops Artifacts and Removes Hydrocarbons and Organics.

Updated March 2009

What's New?

March 2009: XEI Introduces new low power RF power supply for only $2494 USD. O-20 Watts at 13.56 MHz. Model RFS-20

September 2008: XEI Scientific products are certified for product safety and Quality Assurance by TUV Rheinlander USA for the TUV NRTL mark and Semi S2 standards. The inspection certified that XEI manufacturing is done with controlled BOMs, and controllered Assembly and Test procedures. Safety tests now include HiPot and ground continuity on all units. Functional tests include Vacuum leak detection, and overnight burn-in tests. All products now will carry the the marks

and

CE and RoHS:
XEI is also CE certified by TUV for all Evactron Models, and complies with the RoHs, "Reduction of Hazardous Substances" initiative, or lead free initiative required for continue sales to Europe after July 1, 2006.

April 2008: XEI Scientific visited the Society of Vacuum Coaters Technical Conference. We introduced the new Evactron 55 De-Contaminator for large chambers at the show and received a great deal of interest for various Evactron applications beyond electron microscopy. Our Application Scientist, Dr. Gabe Morgan, gave a presentation about our products in a Technical Session on Plasma Processing.
P-17 Low Power Remote Plasma Cleaning .pdf
Another interesting presentation was by Elisabeth Strein, an undergraduate researcher working with Prof. David Allred at Brigham Young University. She presented surface ellipsometry data and X-ray photoelectron spectra (XPS) showing that significant amounts of adventitious carbon can be deposited on substrates in as little as six hours of storage in air. She also reported that using an Evactron C attached to her XPS antechamber helped make sure that the carbon deposits she observed were not from contamination in her XPS system.

February 2008 NIST publishes new contamination specifications using the Evactron® RF Plasma Cleaners. XEI Scientific attended the SPIE Advanced Microlithograpy Convention and we have a New paper published:
Contamination Specification for Dimensional Metrology SEMs (Abstract 6922-41, page 75 of SPIE's 2008 Advanced Microlithography Technical Abstract Summaries) by András E. Vladár, K. P. Purushotham and Michael T. Postek. Evactron® RF Plasma Cleaner prevents erroneous readings of etchings in integrated circuits, due to electron microscope contamination.

October 2007 XEI introduces our exciting Evactron® 25 Tabletop model De-Contaminator (D-C) which works the same way as the Rackmounted Evactron® 45 (D-C) model!

Aug. 1, 2007 XEI introduced our exciting new Rackmounted Evactron® 45 De-Contaminator (D-C) and 40 which operates via PC control. For cleaning scanning electron microscopes. We're pushing the frontiers electron microscope cleaning technology to improve resolution and imaging time for 21st century needs. Evactron® D-C cleaning uses a unique, cutting edge process for remote plasma production of oxygen radicals that flow downstream through your system, removing hydrocarbons. These new user friendly Evactron® D-C models optimize remote plasma cleaning perfectly to the needs of the user.

Aug. 10, 2007 One Piece ORS for Evactron 45, 40, and 25 Models The One Piece ORS (Oxygen Radical Source) is an extra cost option for the Evactron® 45 and 25 model series of Evactron Decontaminators. It has been designed for use where a cleaner look, fewer O-rings seals, and a compact space are requirements. Made of all stainless steel with VCR fittings for the gauges and valve it is suitable for operation to pressures down to 10-8 Torr in high vacuum equipment. All metal seals are used in the CF version except for viton valve seats in solenoid valves. VCR fittings are used for the Mini-Pirani gauge and to connect the valves. The external fitting is CF 2.75" or KF40..pdf

Feb. 6, 2007 Zyvex and XEI settle patent dispute. Ronald Vane and XEI Scientific have agreed to licence the Evactron® Patents to Zyvex Corporation for the Zyvex Optimizer. Zyvex will sell the Optimizer only to Zyvex nanoprober users, and will begin to buy a new Evactron D-C model when it is available to replace the Optimizer. This settlement allows both companies to specialize in the areas of expertise and to end their expensive lawsuit

.May 1, 2006 No Charge Factory Service. XEI Scientific Inc. announces that all Evactron Anti-Contaminators and De-Contaminators built since 2003 can now receive free factory service. XEI does not want our customers to be delayed in cleaning their SEM or FIB because their Evactron unit needs servicing. XEI can overnight fix these Evactron units and install upgrades that make them better for next day return. XEI even fixes drop damage like broken feedthroughs for free. The Customer only pays for shipping. Call XEI at 1-650-369-0133 for a Return Authorization before returning

Jan 1, 2006 New XEI warranty against UTW damage. No one has lost an EDS UTW to Evactron damage so now XEI will supply a warranty that it will not happen.XEI Scientific Inc. will pay for Moxtek UTW replacement on SEM and FIB systems equipped the Evactron® D-C if Moxtek shows that the window or vacuum seal failure was due to corrosion damage by the Evactron® Cleaning process. This warranty is limited to the window replacement cost and repair of the EDS system, and does not cover the cost for loss of use of the systems. Windows judged by Moxtex to have failed from other causes or that reached the limit of their normal expected lifetime are not covered."

 

Microscopy and Microanalysis 2009 Poster session
In 2009 XEI will continue our efforts to improve the effectiveness of Evactron cleaning and to scientifically study the effectiveness of Evactron contamination control.

Abstracts are due Monday Feb. 15, 2009
We are planning studies on the oxidation rates of contaminates exposed to Evactron cleaning and RGA studies of Hydrocarbon removal. Please consider contributing your own paper on Evactron cleaning experiences to this conference. XEI support is available for those needing instrumentation or financial help to perform this research.