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XEI Scientific, Inc.
Plasma Cleaner
for Electron Microscopes
The
EVACTRON® Anti-Contaminator and De-Contaminator
Updated March
2009 What's New? March 2009: XEI Introduces new low power RF power supply for only $2494 USD. O-20 Watts at 13.56 MHz. Model RFS-20 September 2008: XEI Scientific products are certified for product safety and Quality Assurance by TUV Rheinlander USA for the TUV NRTL mark and Semi S2 standards. The inspection certified that XEI manufacturing is done with controlled BOMs, and controllered Assembly and Test procedures. Safety tests now include HiPot and ground continuity on all units. Functional tests include Vacuum leak detection, and overnight burn-in tests. All products now will carry the the marks
CE and RoHS:
April
2008: XEI Scientific visited the Society
of Vacuum Coaters Technical Conference.
We introduced the new Evactron 55 De-Contaminator for large chambers
at the show and received a great deal of interest for various
Evactron applications beyond electron microscopy. Our Application
Scientist, Dr. Gabe Morgan, gave a presentation about our products in
a Technical Session on Plasma Processing.
February
2008 NIST
publishes new contamination specifications using
the Evactron®
RF Plasma Cleaners. XEI
Scientific attended the SPIE
Advanced Microlithograpy Convention and we have a New
paper published: October 2007 XEI introduces our exciting Evactron® 25 Tabletop model De-Contaminator (D-C) which works the same way as the Rackmounted Evactron® 45 (D-C) model! Aug. 1, 2007 XEI introduced our exciting new Rackmounted Evactron® 45 De-Contaminator (D-C) and 40 which operates via PC control. For cleaning scanning electron microscopes. We're pushing the frontiers electron microscope cleaning technology to improve resolution and imaging time for 21st century needs. Evactron® D-C cleaning uses a unique, cutting edge process for remote plasma production of oxygen radicals that flow downstream through your system, removing hydrocarbons. These new user friendly Evactron® D-C models optimize remote plasma cleaning perfectly to the needs of the user. Aug. 10, 2007 One Piece ORS for Evactron 45, 40, and 25 Models The One Piece ORS (Oxygen Radical Source) is an extra cost option for the Evactron® 45 and 25 model series of Evactron Decontaminators. It has been designed for use where a cleaner look, fewer O-rings seals, and a compact space are requirements. Made of all stainless steel with VCR fittings for the gauges and valve it is suitable for operation to pressures down to 10-8 Torr in high vacuum equipment. All metal seals are used in the CF version except for viton valve seats in solenoid valves. VCR fittings are used for the Mini-Pirani gauge and to connect the valves. The external fitting is CF 2.75" or KF40..pdf Feb. 6, 2007 Zyvex and XEI settle patent dispute. Ronald Vane and XEI Scientific have agreed to licence the Evactron® Patents to Zyvex Corporation for the Zyvex Optimizer. Zyvex will sell the Optimizer only to Zyvex nanoprober users, and will begin to buy a new Evactron D-C model when it is available to replace the Optimizer. This settlement allows both companies to specialize in the areas of expertise and to end their expensive lawsuit .May 1, 2006 No Charge Factory Service. XEI Scientific Inc. announces that all Evactron Anti-Contaminators and De-Contaminators built since 2003 can now receive free factory service. XEI does not want our customers to be delayed in cleaning their SEM or FIB because their Evactron unit needs servicing. XEI can overnight fix these Evactron units and install upgrades that make them better for next day return. XEI even fixes drop damage like broken feedthroughs for free. The Customer only pays for shipping. Call XEI at 1-650-369-0133 for a Return Authorization before returning Jan 1, 2006 New XEI warranty against UTW damage. No one has lost an EDS UTW to Evactron damage so now XEI will supply a warranty that it will not happen.XEI Scientific Inc. will pay for Moxtek UTW replacement on SEM and FIB systems equipped the Evactron® D-C if Moxtek shows that the window or vacuum seal failure was due to corrosion damage by the Evactron® Cleaning process. This warranty is limited to the window replacement cost and repair of the EDS system, and does not cover the cost for loss of use of the systems. Windows judged by Moxtex to have failed from other causes or that reached the limit of their normal expected lifetime are not covered."
Microscopy
and Microanalysis 2009
Poster session
Abstracts
are due Monday Feb. 15,
2009
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