Vladimir Mancevski, President and CTO, Xidex Corporation; Philip D. Rack, Professor, The University of Tennessee at Knoxville
Presented at the 2010 Materials Science and Technology Conference, October 2010, Houston, TX
Xidex has developed the NanoBot® nanomanipulator, which can be used as a vapor-phase cutting system to etch carbon nanotubes. They report (see slide 19) that plasma cleaning using the Evactron De-Contaminator inside the SEM chamber can reduce competitive carbon deposition and enhance etching.
