Christopher G. Morgan, David Varley, and Ronald Vane, XEI Scientific, Inc., Redwood City, CA
Poster Presentation at Microscopy and Microanalysis Meeting, August 2010, Portland, OR

A new method for using the Evactron D-C to clean TEMs is reported. The RF electrode used to create the oxygen radicals is now mounted on the end of a TEM sample rod. The impedance matching network and gas delivery hardware are placed on the other end of the sample rod, which is hollow to allow oxygen containing gas to reach the electrode.

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