Christopher G. Morgan, Mark M. Gleason and Ronald Vane, XEI Scientific, Inc., Redwood City, CA
Poster Presentations at Microscopy and Microanalysis Meeting, August, 2007, Ft. Lauderdale, FL

Quartz crystal microbalances (QCMs) are a standard tool for vacuum deposition measurements. They can also be adapted to measure contamination removal by plasma cleaning. Here, they are used to record a thickness loss rate of an oil layer previously deposited on their surface; this loss rate is a measure of the cleaning effectiveness of the Evactron Decontaminator.

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