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XEI Scientific, Inc.

RF Plasma Cleaning Systems for Electron Microscopes and High Vacuum Systems

The EVACTRON® Anti-Contaminator and De-Contaminator Stops Artifacts and Removes Hydrocarbons and Organics.

Updated January 2010

Gentle, Fast, Convenient, and Effective Plasma Cleaning:
Call 1.650.369.0133

The Evactron De-Contaminator is a RF plasma cleaner for EXTERNAL mounting on vacuum chambers and electron microscopes.

Plasma Cleaning using the Evactron D-C IMPROVES SEM (scanning electron microscope & FIB) PERFORMANCE,

for the BEST IMAGES possible.

The Evactron® RF plasma cleaner removes atmospheric molecular contamination, improving scanning electron microscope (SEM) performance. It cleans and removes oils and other hydrocabon from all vacuum chambers for clean images, carbon-free analysis, and clean substrates for improved adhesion and uniformity of fine vacuum coatings. The Evactron De-Contaminator is a RF plasma asher for external mounting on vacuum chambers and electron microscopes.

Low power prevents instrument damage!

The Evactron De-Contaminator uses air for gentle oxidation.

With The Evactron® RF plasma cleaner, you get SEM
images with higher resolution and contrast, carbon-free EUV optics and superior fine vacuum film coatings!

     EVACTRON® Anticontaminator  - 2 configurations: Table Top (left) and Rackmounted (Right)

   

             
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How Evactron® RF Plasma Cleaning Works

Evactron® RF plasma creates oxygen radicals that sweep hydrocarbons, organics, and surface carbon from Electron Microscopes and fine vacuum coating systems.


Atmospheric contaminants get swept through the roughing pump. After cleaning, turn off the Evactron® RF plasma and you get great SEM photos and a clean substrates for your fine vacuum coatings.

 Typical SEM Oil Contamination Problems Solved by Evactron cleaning:

  Black Squares and Oil Buildup on X-ray Detectors

The Causes: Specimen borne hydrocarbons, Oil Backstreaming, oil built-in during manufacturing, poor vacuum practice, dirty specimens, and the environment.

The Solution: Plasma cleaning inside the SEM and other high vacuum chambers. The Evactron process is better than traps or dry pumps because it actively removes all hydrocarbons rather than trying to stop the source.

 

EVACTRON® is a registered trademark of XEI Scientific.

How to contact us:
XEI Scientific, Inc.
1755 East Bayshore Rd, Suite 17
Redwood City, CA 94063
Phone 1 (650) 369-0133, 1 (800) 500-0133
FAX 650-363-1659
General technical information: information@evactron.com

Sales and quotations: sales@evactron.com, 1 (415) 566-5774,
fax 1 (415) 566-9779