XEI Scientific, Inc.
RF Plasma Cleaning Systems for Electron Microscopes
and High Vacuum Systems

The EVACTRON® Anti-Contaminator and De-Contaminator
Stops Artifacts and Removes Hydrocarbons and Organics.

Updated August 2007

Evactron® Adaptor Flanges .pdf

Required Accessory for most SEMs and FIBs

The Evactron A-C plasma head uses a standard ISO KF 40 flange to connect it to the vacuum system. Adaptor flanges are used to connect the Evactron plasma head to the Microscope or vacuum chamber. Flanges to almost any EM or vacuum chamber can be manufactured. See Special Order section below.

Electron Microscope Adaptor Flanges:

We have drawings and stock flanges for many common SEMs. Listed by EM Manufacturer: Flanges are often used on more than one model of EM. Other flanges by special order. To identify correct flange we list the following information (dimensions in mm): OD: exterior outside diameter, ORID: O-Ring inside diameter, HP: mounting Hole pattern. All flanges made of 304 stainless steel. Drawings on request.

 

Evactron Adaptor Flanges - SEM Port to KF40

Part Number.... Description.... OD: Outside diameter of flange.... ORID: O Ring Inside Diameter O-rings not included.... H: mounting holes #.... Dimensions are in millimeters
FEI
230090-01................FEI GIS ASYM HEX,
230141-01................FEI OD-100 ORID-75, 6H symmetric
230153-01................FEI OD 85 ORID 60, 3H
230154-01................FEI OD-100 ORID-70, 3H
230235-01................FEI TECHNAI PLUG
230335-01................FEI 235 OD 88, ORID 60, 3H
230350-01................FEI LARGE OD 120, ORID 60,
230351-01................FEI Stata Y port I PIECE OD 59 ORID 38
230359-01................FEI OD 90 ORID 70 3H
HITACHI
230568-01................HITACHI OD-69, ORID-47.5, 4H SYM
230320-01................HITACHI S 5000 PLUG, 4H
230333-01................HITACHI S5200 PLUG, 4H
ISI
230588-01................ISI RECT 330 X180 4H
JEOL
230001-01................JEOL 6700f, OD 64 ORID 40, 4H
230002-01................JEOL 99 OD, 75 ORID, 4H
230311-01................JEOL 6500, OD 88, ORID, 45, 4 ASYM
230322-01................JEOL 6320 Arched 98HX75W 4H
230323-01................JEOL 5900, OD 94, ORID 65 4H
230324-01................JEOL 6360, OD 99, ORID 75 4H
230664-01................JEOL OM port OD-95, ORID-76, 3H SYM
230672-01................JEOL OD 160, ORID 110
230893-01................JEOL JSM-35,WDS port
LIECA
230012-01................LEICA 360, 64SQ 4H
ZEISS (LEO)
230019-01................ZEISS OD 78, ORID 53, 4H
230034-01................ZEISS LEFT 96mm, 72 ORID 4H sym
230356-01................ZEISS LF 100, ORID 60, 3H
230357-01................ZEISS OD 89, ORID 60, 4H ASYM
230358-01................ZIESS EDS, RECT 97 x 81
230364-01................ZEISS SQ 85MM ORID 70
230366-01................ZEISS WDS 190x150

 

Special Order Flanges: It is impossible to list all possible port flanges. Adaptor flanges for most ports can be made for special order: Selected port must allow minimum of 25 mm (1 inch) hole in center and have exterior clearance.

Submit drawing showing outside diameter, thickness, o-ring grove dimensions, mounting hole pattern, mounting hole dimensions, and any special information needed to reproduce flange. Please review drawing for all dimensions that might be needed by a machinist to make a copy. Most special order flanges with no special considerations will cost $900. New flange sizes for popular models may cost less.

Note: It is always faster to take to flange off and measure it with calipers yourself than to order drawing copies from the manufacturer.

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