XEI Scientific, Inc.
The EVACTRON® Anti-Contaminator and De-Contaminator Updated August 2007
Examples
of Evactron Cleaning
In
CD SEM work the modification of dimensions by the SEM
measurement process can cause loss of precision in the measurement
process. On a very clean Hitachi 6280, the test pattern below began
to show filling-in of the holes after a long scan (20 minutes). After
EVACTRON cleaning the chamber and the specimen in-situ a repeat of
the measurement showed no filing of the holes and a very reduced scan
mark.
-Andras
Vladar NIST
Carry-over
or line width growth during multiple CD sem scans is a major
area of concern. Evactron Cleaning for just 30 minutes stopped
carry-over in the results shown below after the very first Evactron
cleaning of the tool.
Black
focusing squares on a resolution test specimens are are
common problem. Before cleaning the instrument for the first time a
black square covers the scanned area. After cleaning for 5 minutes the
square is greatly reduced. Further cleaning removed all evidence of
scan squares. -
Andras
Vladar, NIST
Courtesy
of Bryan Tracy, Spansion
PLEASE GO TO Papers for more examples in publications.
RF Plasma Cleaning Systems for Electron Microscopes
and High Vacuum Systems
Stops Artifacts and Removes Hydrocarbons and Organics.
Before
cleaning
After
cleaning
Before
After
