XEI Scientific Inc.'s
Evactron^® Model 45 Decontaminator

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XEI Scientific, Inc. manufactures the Evactron^® De-Contaminator, a compact remote plasma cleaning device which can remove hydrocarbon contamination from vacuum chambers such as scanning electron microscopes (SEMs). XEI Scientific also manufactures a plasma cleaner which can be inserted in a transmission electron microscope (TEM) and a low power 13.56 MHz RF generator.

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Evactron Model 45 Decontaminator

Download the Evactron Model 45 Decontaminator Spec Sheet.pdf

This rack-mounted models can be embedded into SEMs, FIBs, and other vacuum systems, providing system manufacturers the ability to integrate remote plasma cleaning capability. The Evactron Model 45 Decontaminator (D-C) produces gas-phase radicals that flow downstream through the chamber, removing hydrocarbon contamination.

Over 1,100 of the Evactron De-Contaminator systems report no X-ray window failures.

• Free 5 year limited warranty
• Just use air for oxygen radicals, or use other gases
for alternative plasma processes
• Easy setup and operation. Preset pressure, power and time settings
• Can be operated from either front panel or computer interface
• Optional shroud can cover transducer and valve assembly on the Plasma Radical Source
• Start cleaning by using chamber vent and evacuation controls
• Advanced plasma detection logic
• Cleaning and error logs record history and aid troubleshooting
• Electronic chassis: H,W,D: 3.5” x 19” x 7” (9x23x48 cm)
• RF Power: 5-20 Watts at 13.56 MHz
• KF 40 vacuum mounting flange, adapter flanges available
• 90-250 VAC 50/60 Hz input
• Shipping— 20 lb. (10 kg.)

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XEI Scientific Inc.'sEvactron® Model 45 Decontaminator

XEI Scientific Inc.'s
Evactron^® Model 45 Decontaminator