XEI Scientific Inc.'s
Evactron® TEM Wand™ Decontaminator
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XEI Scientific, Inc. manufactures the Evactron® De-Contaminator, a compact remote plasma cleaning device which can remove hydrocarbon contamination from vacuum chambers such as scanning electron microscopes (SEMs). XEI Scientific also manufactures a plasma cleaner which can be inserted in a transmission electron microscope (TEM) and a low power 13.56 MHz RF generator.
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Evactron TEM Wand Decontaminator
Download the Evactron TEM Wand Decontaminator Spec Sheet.pdf
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The Evactron TEM Wand allows the user to quickly remove unwanted hydrocarbons from the internal surfaces surrounding the sample area. The RF electrode used to create the oxygen radicals is now mounted on the end of a TEM sample rod.
The user first vents the chamber and then inserts the Wand, similar to the way one would exchange a specimen. Now, cleaning in the TEM can occur right where it is needed — in the critical sample examination region. After cleaning, the user removes the Wand and allows the chamber to pump down. The result is a hydrocarbon-free TEM that is ready to produce higher quality images.
The Evactron TEM Wand includes:
• Special RF Plasma Radical Source (PRS) that are designed for use with TEMs, and the Evactron Model 25 Controller and standard PRS (Plasma Radical Source)
• Easy setup and operation
• Start cleaning by using chamber vent and evacuation controls
• Just use air for oxygen radicals, or use other gases for alternative plasma processes
• Advanced plasma detection logic
• Cleaning and error logs record history and aid troubleshooting
• RF Power: 5-20 Watts at 13.56 MHz
• Includes bundled cable set, power cord, CD, RS232 cable, and instructions
• Free 5 year limited warranty
• Electronic chassis: H,W,D: 5.5” x 9.375” x 9.75” (14x24x25 cm)
• 90-250 VAC 50/60 Hz input
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