XEI Scientific Inc.'s
Evactron
® RFS-20
Low Power

RF Generator/Plasma Asher

Link to XEI's general brochure

Download our standard catalog

XEI Scientific, Inc. manufactures the Evactron® De-Contaminator, a compact remote plasma cleaning device which can remove hydrocarbon contamination from vacuum chambers such as scanning electron microscopes (SEMs). XEI Scientific also manufactures a plasma cleaner which can be inserted in a transmission electron microscope (TEM) and a low power 13.56 MHz RF generator.

PRICING: Contact local distributors, listed in our Sales page.

See our full list of products here.

 

Link to XEI's brochure for EUV applications

New EUV Product

Evactron RFS-20 Low Power RF Generator

Download the Evactron RFS-20 Low Power Generator Spec Sheet.pdf

The RF generator used in the Evactron® RF plasma asher and De-Contaminator as a stand alone unit.


• 0-20 watts
• 13.56 MHz, single frequency, 50 Ohm BNC output
• 3 digit power readout, switch selectable forward or reverse power
• Air Cooled
• 90-240VAC 50-60HZ input 100 Watts max
• Remote control connector on rear
• Electronic Chassis: H x W x D: 14 x 23 x 19 cm, (5.5" x 9" x 7")
• Weight 4 Kg
• 5 year warranty

RF output connection interlock (switch optional) - checks DC continuity of RF cable and load.
Remote interface for use with computers and remote control.

 

 

Evactron RFS-20 Low Power Generator/Plasma Asher

 

 

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