Evactron E-Series Plasma De-Contaminators™

SEM AND FIB VACUUM CHAMBER CLEANING SYSTEM

The Evactron E-Series De-Contaminators are compact, high performance yet simplified plasma cleaners for Electron and Ion Beam Instruments such as SEMs, TEMs, and FIBs. The E-Series delivers cleaning with simplicity for higher resolution and contrast imaging plus improving detector and probe sensitivity that are compromised by contamination.

The compact design of the Evactron E-Series Plasma Radical Source makes it a versatile solution for either SEM/FIB chambers, load locks, or sample prep chambers. The Evactron E-Series Plasma Cleaners offer fast, effective, and gentle cleaning over a wide range of pressures enabling high quality, artifact free images and increased efficiency of sample analysis.

System Features

  • Dual action cleaning using plasma and UV afterglow
  • Energy efficient hollow cathode, capacitive coupled plasma (CCP)
  • “Pop” ignition (patent pending) at high vacuum
  • Programmable power, cleaning time, number of cycles, recipes
  • Windows or Android GUI software
  • Wide range pressure operation: 0.3 Pa/ 2 mTorr to 80 Pa/ 600 mTorr
  • Vacuum safety interlock and optional external interlock connection
  • TMP compatible, no advance venting needed
  • Fast cleaning, 60X+ faster than earlier generation Evactron models
  • Non-damaging to sensitive components – no sputter etch
  • PRS can be installed on the SEM chamber or the load lock
  • Push button cleaning operation
  • No match or gas flow adjustments needed for plasma ignition

Evactron® Model EP Plasma De-Contaminator™

The Evactron EP Plasma De-Contaminator is the newest model in the Evactron family of products. The EP system was designed to be user installed for removal of hydrocarbon contamination from high vacuum chambers such as SEMs and FIBs. The Evactron EP Plasma De-Contaminator fits most models of SEM and FIB systems.

 

System Specifications

  • Desktop controller with pushbutton operation
  • Windows GUI or Android tablet interface (option)
  • Vacuum safety interlock and hardware interlock
  • Chassis dimensions: W×H×D: 17”×3.4”×6.7”(43×8.6×17 cm)
  • RF Power: 10 – 20 Watts at 13.56 MHz CCP
  • 100-240 VAC 50/60 Hz input
  • CE/TUV/NRTL safety certified
  • RoHS Compliant

Evactron® Model ES Plasma De-Contaminator™

The Evactron ES Plasma De-Contaminator was designed for OEM integration for SEM, FIB, High vacuum, and other analytical instruments. This simplified Evactron Plasma Radical Source (PRS) utilizes air plasma afterglow to reduce hydrocarbon contamination, delivering results quickly and efficiently.

 

System Specifications

  • SEM/FIB host directed control
  • 2U rack mount controller for system integration
  • Optional hardware interlock
  • Small compact Plasma Radical Source (PRS)
  • RF Power: 10 – 20 Watts at 13.56 MHz CCP
  • 100-240 VAC 50/60 Hz input
  • CE/TUV/NRTL safety certified
  • RoHS Compliant