XEI Documents and Specifications

The following Documents are available

NEW! Evactron 45 - .pdf

NEW! DSS1 for cleaning larger areas - .pdf

CE Declaration of Conformity - .pdf

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Five Year Warranty and Repair Policy

The Evactron D-C is designed to operate for extended periods without failures or repairs. The unit contains no consumables.

This EVACTRON plasma cleaning system carries a limited factory service warranty on parts and workmanship for a period of 5 years from date of delivery. Such defects will be repaired at no charge at the factory. All units will be reviewed and evaluated at XEI Scientific, Inc. prior to credit being issued or repairs being made.  Most repairs are completed within one day after receipt and all units are operated overnight before return. Shipping of units is done at Customer’s expense. However, if repair due to part defects or workmanship is needed within 1 year of date of delivery, XEI Scientific, Inc. will pay for shipping.  No purchase order is needed.

Prior to returning the unit for repair, you must contact XEI to obtain an RMA (Return Materials Authorization) Code.  You may reach us at +1-650-369-0133 or 1-800-500-0133 (within USA only).  Also, you may send an email to: Service@evactron.com, to obtain your RMA Code and shipping instructions.  When contacting us, you will need to provide the following information:

• Unit serial numbers (located on rear of unit and on Match box).   Any request for warranty repair REQUIRES reference to the Item’s serial number(s).
• Model number             (Evactron C, 25, 40, or 45 D-C)
• Reason for return

Clearly mark the RMA number on the packaging so that it is highly visible and easily identified. 
Shipping must be pre-paid.  We will refuse all CODs.  Unauthorized returns will not be accepted.  Once you obtain your RMA, please return the unit freight pre-paid to:

XEI Scientific, Inc.
1755 East Bayshore Rd. Suite 17C
Redwood City, CA 94063

All warranty repairs are to be carried out exclusively at the factory at XEI Scientific, Inc.  Any repairs attempted without the explicit authorization of XEI Scientific, Inc. will void the warranty.   
XEI Scientific, Inc. assumes no liability, and the warranty becomes null and void if the end user or third parties:

• Disregard the information in the manual.
• Use the product in a non-conforming manner.
• Abuse or damage the product by misuse or handling.
• Make any of modifications, alterations, unauthorized repairs, or changes to the product.
• Use the product in a manner not listed in this document or otherwise approved by XEI Scientific, Inc.
• Allow the product to become contaminated by hazardous or radioactive materials.
• Cause shipping damage due to improper packing for shipment.

XEI Warrants Moxtek UTW Windows Against Evactron Cleaning Damage
Evactron Cleaning causes no significant damage to Moxtek UTW EDS windows based on our extended in-house exposure tests and field experience. XEI makes the following warranty: "XEI Scientific, Inc. will pay for Moxtek UTW replacement on SEM and FIB systems equipped the Evactron D-C if Moxtek shows that the window or vacuum seal failure was due to corrosion damage by the Evactron Cleaning process. This warranty is limited to the window replacement cost and repair of the EDS system, and does not cover the cost for loss of use of the systems. Windows judged by Moxtex to have failed from other causes or that reached the limit of their normal expected lifetime are not covered.”