XEI Scientific Inc.'s
Evactron® CombiClean™ System
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XEI Scientific, Inc. manufactures the Evactron® De-Contaminator, a compact remote plasma cleaning device which can remove hydrocarbon contamination from vacuum chambers such as scanning electron microscopes (SEMs). XEI Scientific also manufactures a plasma cleaner which can be inserted in a transmission electron microscope (TEM) and a low power 13.56 MHz RF generator.
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New EUV Product
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NEW Evactron CombiClean System
Download the Evactron CombiClean System Spec Sheet.pdf
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The Evactron® CombiClean™System combines onboard vacuum cleaning chamber and external PRS (Plasma Radical Source) control in one unified system.
Decontaminate specimens and columns of SEMs and FIBs.
Innovative Design
Designed as a complete cleaning solution, the Evactron CombiClean System features an integrated vacuum chamber for desktop cleaning samples and vacuum parts, as well as an external Plasma Radical Source (PRS) for Evactron in-situ cleaning of E-beam instruments such as SEMs, FIBs, and other analytic instruments by removing carbon contamination. The system monitors operation of either PRS unit, has internal memory, and is designed for routine operation with minimal operator training. Onboard control allows for changing the cleaning modes between external and internal PRS with just the flip of a switch. This system is compatible with rotary vane pumps without the worry of oil backstreaming. A dry nitrogen purge feature keeps specimens clean after a plasma cleaning, and a storage mode allows you to continue dry nitrogen purging a sample while the external PRS is in use.
System Highlights
The system features a microprocessor with embedded software to regulate a leak valve and control the chamber pressure by a MicroPirani gauge. The microprocessor also regulates the RF power, has a clock to time the downstream plasma cleaning and nitrogen purging cycles,
and records the operational and fault log. Cleaning with the Evactron CombiClean System may be setup from either the front panel or a remote computer.
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