XEI Scientific, Inc.
RF Plasma Cleaner for Electron Microscopes
and High Vacuum Systems

The EVACTRON® De-Contaminator
Stops Artifacts and Removes Hydrocarbons and Organics.

Updated January 2010

Evactron® Products Page

Evactron C Model
Local Control

Evactron 25 Model
Remote and Local Control

Evactron 45 Model
Local and remote control

Evactron 40 model
Remote controlled

RFS-20
Low Power RF power Supply

Evactron ORS options

Now + on all Products

Evactron® 25, 40 and 45
 RF Plasma Ashers

Click on photo(s) for more information

   


Our newest microprocessor controlled systems are simple to operate with easy to customize operating recipes. Press the "Enable" button and the unit will start plasma cleaning in your chamber the next time the pressure is cycled. This occurs by raising the pressure, which restarts evacuation from your instrument's evacuation control system. Downstream Plasma cleaning recipe setup is done either through a computer interface or from the front panel. Settings include cleaning time, nitrogen purging time, plasma vacuum level, RF power level, purging pressure, plasma ignition pressure, and multiple plasma-purge cycles. The RF systems generate 5-20 Watts of RF power for optimum low power cleaning with air. For most users, only the cleaning time is routinely reset. The default settings are normally used for the other parameters.

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ORS (Oxygen Radical Sources)
for Evactron ® D-C Models 25, 40 and 45

Ors Specs .pdf

The Standard ORS is supplied with each system unless optional ORS is ordered.

   

   

  Standard ORS

   

  ORS H (high vacuum)

   

  ORS U (ultra-high vacuum)

   

 Standard ORS

  • Assembled body
  • KF 40 fittings
  • Viton O-rings and seals
  • High vacuum tested to
    <5X10-7 Torr
    		•

     

     ORS H

  • One piece body
  • KF 40 fitting to chamber
  • Viton Orings and valve seal
  • He leak tested to
    < 10-8 atm cc/sec
    		•

     

    ORS U

    • One piece Body
    • CF fitting to chamber
    • All metal seals and valve seats
    • He Leak tested to
      < 10-9 atm cc/sec

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    Classic Evactron® De-Contaminators

       

    Evactron® C

       

       

       

       

     

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    Gentle Asher:

    Desktop Evactron cleaning of specimen without sputtering with this accessory.

    Pre-cleans the samples and works
    great with Evactron's chamber cleaning.

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    XEI Scientific Evactron® Adaptor Flanges - Required Accessory for most SEMs.
    Sold separately.

    PRICING: Contact local distributors for pricing. See Sales for distribution information.