|



| |
XEI Scientific, Inc.
RF Plasma Cleaning Systems for Electron Microscopes and High Vacuum Systems
The EVACTRON® Anti-Contaminator and De-Contaminator
Stops Artifacts and Removes Hydrocarbons and Organics.
Updated November 2007
     
Evactron® Products Page
New Evactron® 25, 40 and 45
Click on photo(s) for more information
|
Our newest microprocessor controlled systems are simple to operate with easy to customize operating recipes. Press the "Enable" button and the unit will start plasma cleaning in your chamber the next time the pressure is raised and evacuation is restarted form your instruments evacuation control system. Downstream Plasma cleaning recipe setup is done either through a computer interface or from the front panel. 5-20 Watts of RF power for optimum low power cleaning with air.
|
________________________
ORS (Oxygen Radical Sources) for Evactron ® D-C Models 25, 40 and 45
Ors Specs .pdf
The Standard ORS is supplied with each system unless optional ORS is ordered.
 |
|
 |
|
 |
| Standard ORS |
|
ORS H (high vacuum) |
|
ORS U (ultra-high vacuum) |
|
Standard ORS
- Assembled body
- KF 40 fittings
- Viton O-rings and seals
- High vacuum tested to
< 5X10-7 Torr
|
|
ORS H
- One piece body
- KF 40 fitting to chamber
- Viton Orings and valve seal
- He leak tested to
< 10-8 atm cc/sec
|
|
ORS U
- One piece Body
- CF fitting to chamber
- All metal seals and valve seats
- He Leak tested to
< 10-9 atm cc/sec
|
________________________
Classic Evactron® De-Contaminators
 |
|
 |
| Evactron® C |
|
Evactron® 10 |
|
| |
|
Evactron C
- Manual pressure and
RF control
- No timer
|
Evactron 10
- With timer and pressure
sensing plasma start
- Factory preset
operating conditions
- Still available for limited time
|
________________________
DSS1 Dry Plasma System:
High power cleaning of large chambers with flowing afterglow.
NEW Dry Plasma DSS1 .pdf
|
XEI Scientific, Inc in association with Dry Plasma Systems, Inc. introduces new products to complement the Evactron® D-C. While the products are very similar, DSS1 - 100 Plasma Source and DSS1 Control Units are for gentle effective cleaning of larger chambers.
|
________________________

Gentle Asher:
Desktop Evactron cleaning of specimen without sputtering with this accessory.
Pre-cleans the samples and works great with Evactron's chamber cleaning.
________________________
XEI
Scientific Evactron® Adaptor Flanges - Required Accessory for most SEMs. Sold separately.
OTHER INFO:
For OEM applications where a racked mounted controller and central computer control are desired for SEM and FIB cleaning. Similar Vacuum and RF power control to Evactron 10. Uses Evactron 10 ORS valve assembly with modular vacuum gauge.
PRICING:
Prices are FOB Redwood City, CA in US Dollars. Freight, Distributor fees, Customs duties, Taxes, fees and other local charges are not included. Installation andtraining extra.
|