XEI Scientific, Inc.
RF Plasma Cleaning Systems for Electron Microscopes
and High Vacuum Systems

The EVACTRON® Anti-Contaminator and De-Contaminator
Stops Artifacts and Removes Hydrocarbons and Organics.

Updated November 2007

Evactron® Products Page

New Evactron® 25, 40 and 45

Intelligent Design .pdf       Catalog .pdf

Click on photo(s) for more information

   

Our newest microprocessor controlled systems are simple to operate with easy to customize operating recipes. Press the "Enable" button and the unit will start plasma cleaning in your chamber the next time the pressure is raised and evacuation is restarted form your instruments evacuation control system. Downstream Plasma cleaning recipe setup is done either through a computer interface or from the front panel. 5-20 Watts of RF power for optimum low power cleaning with air.

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ORS (Oxygen Radical Sources)
for Evactron ® D-C Models 25, 40 and 45

Ors Specs .pdf

The Standard ORS is supplied with each system unless optional ORS is ordered.

       
  Standard ORS       ORS H (high vacuum)       ORS U (ultra-high vacuum)    

    Standard ORS
  • Assembled body
  • KF 40 fittings
  • Viton O-rings and seals
  • High vacuum tested to
    < 5X10-7 Torr
 
    ORS H
  • One piece body
  • KF 40 fitting to chamber
  • Viton Orings and valve seal
  • He leak tested to
    < 10-8 atm cc/sec
 

    ORS U
  • One piece Body
  • CF fitting to chamber
  • All metal seals and valve seats
  • He Leak tested to
    < 10-9 atm cc/sec

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Classic Evactron® De-Contaminators

   
Evactron® C     Evactron® 10    
       
    Evactron C
  • Manual pressure and RF control
  • No timer
    Evactron 10
  • With timer and pressure sensing plasma start
  • Factory preset operating conditions
  • Still available for limited time

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DSS1 Dry Plasma System:

High power cleaning of large chambers with flowing afterglow.

NEW Dry Plasma DSS1 .pdf

XEI Scientific, Inc in association with Dry Plasma Systems, Inc. introduces new products to complement the Evactron® D-C. While the products are very similar, DSS1 - 100 Plasma Source and DSS1 Control Units are  for gentle effective cleaning of larger chambers.

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Gentle Asher:

Desktop Evactron cleaning of specimen without sputtering with this accessory.

Pre-cleans the samples and works
great with Evactron's chamber cleaning.

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 XEI Scientific Evactron® Adaptor Flanges - Required Accessory for most SEMs.
Sold separately.

OTHER INFO: For OEM applications where a racked mounted controller and central computer control are desired for SEM and FIB cleaning. Similar Vacuum and RF power control to Evactron 10. Uses Evactron 10 ORS valve assembly with modular vacuum gauge.

PRICING: Prices are FOB Redwood City, CA in US Dollars. Freight, Distributor fees, Customs duties, Taxes, fees and other local charges are not included. Installation andtraining extra.