ORS-S
Standard Evactron ORS
The standard Evactron ORS is the ORS-S model. This model has an Aluminum body with iso KF40 fittings at each end. A vacuum gauge and a valve manifold attach to the side in the middle of the body, and a detachable electrode/match assembly is held on the end by a KF 40 clamp, which allows easy replacement of the match for servicing. The O-rings are Viton and the pipe thread sealant is low vapor pressure epoxy (equivalent to Varian Torr Seal). The Pirani gauge is a MKS micropirani. The valves have Viton O-rings. The ORS-s model has a vacuum compatible two-way solenoid valve for vacuum shut-off and a variable solenoid valve for gas flow control. A three-way valve allows selection of a plasma feed gas or dry Nitrogen for purging. The ORS is designed to be compatible with vacuum systems of most analytical electron microscopes that operate in the 10-5 -10-6 Torr range. XEI Scientific tests each ORS-s to reach 5 x 10-7 Torr in one hour of pumping.
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