ORS-H
High Vacuum ORS
This ORS-H model is designed to have a one piece body and a sleeker look than the ORS-s. A KF-40 fitting attaches the ORS to the system chamber. The match is connected directly to the body. The MKS micropirani vacuum gauge is connected by a VCR fitting and the shut off valve is connected with a Swagelok fitting. No epoxy thread seal is used in the parts of the ORS-h exposed to high vacuum. The shutoff valve is high vacuum compatible. The ORS-h is designed to be pumped to the 10-8 Torr range. A variable solenoid valve controls flow and a three way valve selects Nitrogen purge or Plasma gas.
One piece chamber, stainless steel helium leak tested to 1 x 10-8 atm* cc/sec. KF 40 fittings to chamber.
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