ORS-U
Ultra-High Vacuum ORS
The ORS-U model has a one piece body and is designed for use on Ultra High Vacuum systems. Metal seals are used, except for the flow valve seat, for very low permeation of outside gases into the vacuum. A CF 2.75 flange attaches the ORS to the system. The ORS may be baked to 80o C. The flow control valve is a special high vacuum compatible valve with a leak rate of less than 10-9 atm cc/sec. A metal compression seal is used on the flow control valve. For Ultra High Vacuum systems that are baked to 150o C, the ORS must be removed before baking. A bakeable manual gate valve between the chamber and ORS should be used. We recommend the following post-High-Temperature-Baking procedure: After baking main chamber and gate valve, attach the ORS-u. Back fill chamber with dry nitrogen to about 5 Torr. Enable Evactron cleaning and set cleaning time to 5 minutes. Open gate valves and starting pumping. Evactron cleaning will start and adsorbed water vapor and Hydrocarbons will be removed from Evactron chamber. Once the Evactron cleaning stops, the chamber will pump down to operating vacuum without having to pump adsorbed water from the Evactron body.
One piece stainless steel ORS metal seal variable valve, all metal gasgets CF 2¾ fittings to chamber. Helium < 1 x 10-9
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