The Evactron® RF plasma cleaner improves electron microscope imaging and analytical performance by removing contamination. It cleans and breaks down oils and other hydrocarbons in most vacuum chambers resulting in high-quality images and carbon-free analysis. It can be used as an in-situ solution, cleaning EUV and X-ray optics. The Evactron® Decontaminator is a general purpose RF plasma asher capable of external mounting on most vacuum chambers and electron microscopes.
Low power prevents instrument damage! The Evactron® De-Contaminator can use air, oxygen gas, oxygen gas mixtures or hydrogen gas for gentle cleaning and decontamination without damage.
XEI Scientific, Inc. 1755 East Bayshore Rd, Suite 17 Redwood City, CA 94063 · Phone 1 (650) 369-0133, 1 (800) 500-0133 · FAX 650-363-1659
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